Reaction Mechanisms and Rate Limitations in Dry Etching of Silicon Dioxide with Anhydrous Hydrogen Fluoride

2008 ◽  
pp. 182-182-20 ◽  
Author(s):  
LD Clements ◽  
JE Busse ◽  
J Mehta
Keyword(s):  
Silicon Dioxide ◽  
Hydrogen Fluoride ◽  
Reaction Mechanisms ◽  
Dry Etching ◽  
Anhydrous Hydrogen Fluoride

Beta-ionone synthesis using anhydrous hydrogen fluoride

1998 ◽  
Vol 32 (10) ◽  
pp. 557-559 ◽  
Author(s):  
Yu. D. Markovich ◽  
A. V. Panfilov ◽  
A. A. Zhirov ◽  
A. T. Kirsanov ◽  
L. A. Gorbach ◽  
...  
Keyword(s):  
Hydrogen Fluoride ◽  
Anhydrous Hydrogen Fluoride
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