Subseabed Disposal Project Experiment: Piezometer Probe Measurement Technology

2009 ◽  
pp. 175-175-15 ◽  
Author(s):  
RH Bennett ◽  
JT Burns ◽  
H Li ◽  
D Walter ◽  
PJ Valent ◽  
...  
Keyword(s):  
Probe Measurement ◽  
Measurement Technology

Influence Study of Sheet Resistance Measurement Errors by Square Four Probes

2015 ◽  
Vol 734 ◽  
pp. 125-128
Author(s):  
Xin Fu Liu ◽  
Zhi Hui Zhu
Keyword(s):  
Sheet Resistance ◽  
Silicon Wafer ◽  
Measurement Errors ◽  
Maximum Error ◽  
Probe Measurement ◽  
Measurement Technology ◽  
Detailed Data ◽  
Testing Accuracy ◽  
Sheet Resistance Measurement ◽  
The Impact

The article analyses the principle of square four probe measurement technology. The principle of the probe vacillated at testing a large silicon wafer is analyzed, and interference can be avoided while measuring and analyzing the impact on square four probe measurement by probe vacillate. The influence of probe wavering using square four probe method for the equipment designed by authors is analyzed with detailed data, and calculated error of the probe wander. Probe positions of maximum error produced are found, so ensuring testing accuracy schemes are proposed at last.

Study on the Stability of Micro-Area Sheet Resistance at Testing a Large Silicon Wafer when Probes Vacillated

2013 ◽  
Vol 303-306 ◽  
pp. 399-402 ◽  
Author(s):  
Xin Fu Liu ◽  
Zhi Hui Zhu ◽  
Ru Qing Zhang ◽  
Run Li Zhang
Keyword(s):  
Sheet Resistance ◽  
Silicon Wafer ◽  
Measurement Accuracy ◽  
Probe Measurement ◽  
Measurement Technology ◽  
Calculation Formula ◽  
Basic Principles ◽  
Basic Concepts ◽  
The Stability ◽  
The Impact

This article briefly elaborated the basic concepts of the probe vacillated at testing a large silicon wafer with square four point probe equipment. The importance of the micro-area’s sheet resistance is discussed and the basic principles of four point probe measurement technology are analyzed. Some factors that affect the measurement accuracy are studied, and interference can be avoided while measuring and analyzing the impact on square four point probe measurement by probe vacillate. The calculation formula of the square micro-area probe measurement is deduced when probes vacillated discretionarily. At last, an experiment was made with a small wafer sample and accurate resistivity was gotten.

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