Deformation and Stability of Gold/Polysilicon Layered MEMS Plate Structures Subjected to Thermal Loading
2008 ◽
pp. 306-306-12
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2020 ◽
Vol 20
(12)
◽
pp. 2050139
Keyword(s):
1991 ◽
Vol 1991
(170)
◽
pp. 483-491
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2020 ◽
Vol 57
(2)
◽
pp. 70-79
2021 ◽
pp. 095440542199012
Keyword(s):
Keyword(s):