Guide for Analysis and Reporting the Impurity Content and Grade of High Purity Metallic Sputtering Targets for Electronic Thin Film Applications

2001 ◽  
Author(s):  
Materials ◽  
2021 ◽  
Vol 14 (8) ◽  
pp. 2064
Author(s):  
Liang Yu ◽  
Xiaoan Kang ◽  
Luona Chen ◽  
Kun Luo ◽  
Yanli Jiang ◽  
...  

The zone refining method is a physical method for effectively purifying metals. Increasing yield and reducing impurity content have always been the focus of its research. This article systematically summarizes the relevant research on the production of high-purity metals by zone refining, including mechanisms, parameter optimization, zone refining types, analysis methods, limitations, and future development directions, and it provides relevant theoretical foundations for the production of high-purity metals as well.


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