Standard Test Method for Measurement of Film Thickness of Thin-Film Coatings by Non-Destructive Means Using Ruggedized Optical Interference

2020 ◽  
Author(s):  
Keyword(s):  
Thin Film ◽  
Film Thickness ◽  
Standard Test ◽  
Test Method ◽  
Optical Interference ◽  
Film Coatings ◽  
Thin Film Coatings ◽  
Standard Test Method ◽  
Non Destructive

scholarly journals A Review of the Applications of OCT for Analysing Pharmaceutical Film Coatings

2018 ◽  
Vol 8 (12) ◽  
pp. 2700 ◽  
Author(s):  
Hungyen Lin ◽  
Zijian Zhang ◽  
Daniel Markl ◽  
J. Zeitler ◽  
Yaochun Shen
Keyword(s):  
Thin Film ◽  
Optical Coherence Tomography ◽  
Manufacturing Industry ◽  
Dosage Forms ◽  
Pharmaceutical Manufacturing ◽  
Pharmaceutical Dosage Forms ◽  
Film Coatings ◽  
Thin Film Coatings ◽  
Topical Review ◽  
Non Destructive

Optical coherence tomography (OCT) has recently attracted a lot of interest in the pharmaceutical manufacturing industry as a fast, contactless and non-destructive modality for quantifying thin film coatings on pharmaceutical dosage forms, which cannot be resolved easily with other techniques. In this topical review, we present an overview of the research that has been performed to date, highlighting key differences between systems and outlining major challenges ahead.

Planarization with Cyclotene™ 3022 (BCB) Polymer Coatings

1993 ◽  
Vol 308 ◽  
Author(s):  
T.M. Stokich ◽  
C.C. Fulks ◽  
M.T. Bernius ◽  
D.C. Burdeaux ◽  
P.E. Garrou ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Film Thickness ◽  
Polymer Film ◽  
Polymer Coatings ◽  
Polymer Thin Film ◽  
Film Coatings ◽  
Thin Film Coatings ◽  
Processing Procedure ◽  
The Mean

ABSTRACTThis work examines the planarization of polymer thin film coatings derived from Cyclotene™ 3022 prepolymer resins. Cyclotene™ 3022 is a divinyl siloxane bis-benzocyclobutene prepolymer (DVS-BCB, CAS 117732-87-3). It is used primarily as a dielectric in microelectronics applications.Using profilometry, planarization measurements have been made on thin films spun over features consisting of lines and trenches. Feature widths have been varied from 2 to 1000 μm and the feature depths and film thickness have been varied from 1 to 16 μm. Effects of the processing procedure, resin concentration and resin additives have been explored. Local (versus global) planarization will be discussed.Planarization has been found to depend on all feature dimensions and the polymer film thickness. Lines or other structures having a width of 100 μm or less can be planarized to 90% or better with standard commercial formulations of Cyclotene™ 3022, provided that the mean film thickness is twice the line-height or feature-depth. Metals such as Al, Cu, Cr and Ti can all be planarized to this degree; however, surface preparations may influence the result.

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