Inline imaging-ellipsometer for printed electronics
Keyword(s):
AbstractPrinted electronics, e.g. organic photo-voltaic, are usually produced by roll-to-roll printing. For this fast growing market no inline-measurement method for 2D-thickness-distributions after printing exists. In many cases layer-thicknesses are in the sub-μm-range, e.g. 10–300 nm, and ellipsometry is one typical technology for this range, but up to now only in the laboratory, since most ellipsometers are too slow and/or measure only a spot. A new concept, a stroboscopic imaging ellipsometer, enables fast measurement on a line, to acquire the 2D-distribution of thickness, right after printing.
2012 ◽
Vol 226
(11)
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pp. 2726-2738
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Keyword(s):
Keyword(s):
2009 ◽
Vol 15
(8)
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pp. 792-797
2013 ◽
Vol 37
(3)
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pp. 287-294
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