Fabrication of High-Efficiency Piezoelectric Energy Harvesters of Epitaxial Pb(Zr,Ti)O3 Thin Films by Laser Lift-off
Keyword(s):
Lift Off
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AbstractWe fabricated piezoelectric vibration energy harvesters of
2014 ◽
Vol 953-954
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pp. 655-658
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2013 ◽
Vol 2013
(0)
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pp. 46-49
2016 ◽
Vol 773
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pp. 012049
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pp. 1045389X2110322
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Vol 27
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pp. 075053
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Keyword(s):
Keyword(s):