213 nm pitch standards fabricated using atomic lithography
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2006 ◽
Vol 23
(6)
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pp. 1161
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2005 ◽
Vol 248
(1-4)
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pp. 196-199
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2006 ◽
Vol 39
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pp. 997-1009
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2014 ◽
Vol 31
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pp. 2480
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2005 ◽
Vol 109
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pp. 1815-1821
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1998 ◽
Vol 41-42
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pp. 587-590
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2007 ◽
Vol 104
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pp. 839-845
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