A teaching factory for polymer microfabrication – μFac

2010 ◽  
Vol 6 (1/2/3/4) ◽  
pp. 137 ◽  
Author(s):  
David E. Hardt ◽  
Brian W. Anthony ◽  
Shu Beng Tor
Keyword(s):  
Polymer Microfabrication

Simulation and Fabrication of Novel Polymeric Tunneling Sensor by Hot Embossing Technique

2002 ◽  
Author(s):  
Tianhong Cui ◽  
Kody Varahramyan ◽  
Yongjun Zhao ◽  
Jing Wang
Keyword(s):  
Aspect Ratio ◽  
Silicon Wafer ◽  
Optimum Design ◽  
High Aspect Ratio ◽  
Hot Embossing ◽  
Anodic Bonding ◽  
Glass Disk ◽  
Icp Etching ◽  
Sensor Platform ◽  
Polymer Microfabrication

This paper reports the simulation and fabrication of novel polymer-based tunneling sensors by hot embossing technique, one of the advanced polymer microfabrication technologies. ANSYS is the software tools used to simulate the mechanical microstructures of the polymer tunneling sensors. Following the optimum design of the sensors, the mold inserts of hot embossing are fabricated by anodic bonding of glass disk 5 mm think and silicon wafer, with high-aspect-ratio microstructures by ICP etching. Main structures of polymer-based tunneling sensors are hot embossed on PMMA, followed by plastic bonding to form lateral tunneling sensor platform.

scholarly journals Flexible, Penetrating Brain Probes Enabled by Advances in Polymer Microfabrication

Micromachines ◽  
2016 ◽  
Vol 7 (10) ◽  
pp. 180 ◽  
Author(s):  
Ahuva Weltman ◽  
James Yoo ◽  
Ellis Meng
Keyword(s):  
Polymer Microfabrication

Polymer microfabrication by scanning based microstereolithography: Optical design and material functionality

2012 ◽  
Vol 83 (9) ◽  
pp. 095003 ◽  
Author(s):  
Ankur Goswami ◽  
Arindam Phani ◽  
A. M. Umarji ◽  
Giridhar Madras
Keyword(s):  
Optical Design ◽  
Polymer Microfabrication

Cold forging method for polymer microfabrication

2004 ◽  
Vol 44 (10) ◽  
pp. 1998-2004 ◽  
Author(s):  
Donggang Yao ◽  
Pratapkumar Nagarajan
Keyword(s):  
Cold Forging ◽  
Polymer Microfabrication

scholarly journals Cyclic Block Copolymer Microchannel Fabrication and Sealing for Microfluidics Applications

Inventions ◽  
2018 ◽  
Vol 3 (3) ◽  
pp. 49 ◽  
Author(s):  
Chia-Yi Yen ◽  
Moh-Ching Chang ◽  
Zong-Fu Shih ◽  
Yi-Hsing Lien ◽  
Chia-Wen Tsao
Keyword(s):  
Block Copolymer ◽  
Chemical Resistance ◽  
Microfluidic Devices ◽  
Cyclic Olefin ◽  
New Class ◽  
Front End ◽  
Cyclic Block ◽  
Cyclic Olefin Polymers ◽  
Polymer Microfabrication ◽  
Cyclic Olefin Copolymers

High mechanical rigidity, chemical resistance, and ultraviolet-visible light transmissivity of thermoplastics are attractive characteristics in microfluidics because various biomedical microfluidic devices require solvent, acid, or base manipulation, and optical observation or detection. The cyclic block copolymer (CBC) is a new class of thermoplastics with excellent optical properties, low water absorption, favorable chemical resistance, and low density, which make it ideal for use in polymer microfluidic applications. In the polymer microfabrication process, front-end microchannel fabrication and post-end bonding are critical steps that determine the success of polymer microfluidic devices. In this study, for the first time, we verified the performance of CBC created through front-end microchannel fabrication by applying hot embossing and post-end sealing and bonding, and using thermal fusion and ultraviolet (UV)/ozone surface-assist bonding methods. Two grades of CBC were evaluated and compared with two commonly used cyclic olefin polymers, cyclic olefin copolymers (COC), and cyclic olefin polymers (COP). The results indicated that CBCs provided favorable pattern transfer (>99%) efficiency and high bonding strength in microchannel fabrication and bonding procedures, which is ideal for use in microfluidics.

Fabrication Multi-Layer Polymer Microstructures by X-Ray Lithography with Alignment

2010 ◽  
Vol 663-665 ◽  
pp. 1016-1019
Author(s):  
Yi Gui Li ◽  
Susumu Sugiyama
Keyword(s):  
Lactic Acid ◽  
Methyl Methacrylate ◽  
Main Chain ◽  
Large Displacement ◽  
Polymer Materials ◽  
Solvent Interaction ◽  
X Ray ◽  
Polymer Main Chain ◽  
Polymer Microstructures ◽  
Polymer Microfabrication

Poly(methyl methacrylate)(PMMA) and Poly L-lactic acid (PLLA) are transparent and they are suitable for optical purposes. The multi-layer polymer microfabrication can be applied for a large displacement actuator and precision sensors. A new method is intruduced to generate the multi-layer polymers microstructures by X-ray lithography with alignment. The function of X-ray on polymer materials are breaking the polymer main chain and generating intermediates which can be degraded further and finally dissolved by the solvent interaction. The method for polymer micromachining by using X-ray lithography with alignment for fabrication multi-layer micro polymer structures is confirmed experimentatively.

Polymer microfabrication technologies

2002 ◽  
Vol 8 (1) ◽  
pp. 32-36 ◽  
Author(s):  
O. Rötting ◽  
W. Röpke ◽  
H. Becker ◽  
C. Gärtner
Keyword(s):  
Polymer Microfabrication
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