Radial gap measurement and manufacturing error evaluation for small hole machined by micro-EDM

2011 ◽  
Vol 22 (2) ◽  
pp. 94 ◽  
Author(s):  
Zhenyuan Jia ◽  
Xinyi Zheng ◽  
Fuji Wang ◽  
Wei Liu
Keyword(s):  
Small Hole ◽  
Micro Edm ◽  
Error Evaluation ◽  
Manufacturing Error ◽  
Gap Measurement ◽  
Radial Gap

Development and Experimental Study of Multi-Axis Micro-EDM Machine Tool for Small-Hole Based on Linear Motor

2009 ◽  
Vol 69-70 ◽  
pp. 74-78
Author(s):  
Zhen Long Wang ◽  
Mao Sheng Li ◽  
Guan Xin Chi ◽  
Yu Kui Wang ◽  
Wan Sheng Zhao
Keyword(s):  
Machine Tool ◽  
Power Supply ◽  
Open Circuit Voltage ◽  
Linear Motor ◽  
Open Circuit ◽  
Small Hole ◽  
Machining Efficiency ◽  
Micro Edm ◽  
Pulse Power Supply ◽  
Relative Wear

A multi-axis micro-EDM machine tool for small hole is developed. It mainly includes marble base, precision servo and linear-motor platforms, RC pulse power supply, CCD microscope and so on. Superiority of linear motor used on the Z axis is analyzed. Primary experiments, in which small electrodes with different materials are used to machine 3mm thickness TC4, are carried out. Histograms of open-circuit voltage and capacitance to machining efficiency and electrode relative wear and small-hole samples are given. Influence rules of open-circuit voltage and capacitance to machining efficiency and electrode relative wear are analyzed according to experimental results.

Advanced TEM sample preparation techniques for submicron Si devices

1995 ◽  
Vol 53 ◽  
pp. 516-517 ◽  
Author(s):  
P. B. Basham ◽  
H. L. Tsai
Keyword(s):  
Sample Preparation ◽  
Process Development ◽  
Light Transmission ◽  
Specific Area ◽  
Turnaround Time ◽  
Small Hole ◽  
Area Of Interest ◽  
Transmission Electron ◽  
Polished Side ◽  
Preparation Techniques

The use of transmission electron microscopy (TEM) to support process development of advanced microelectronic devices is often challenged by a large amount of samples submitted from wafer fabrication areas and specific-spot analysis. Improving the TEM sample preparation techniques for a fast turnaround time is critical in order to provide a timely support for customers and improve the utilization of TEM. For the specific-area sample preparation, a technique which can be easily prepared with the least amount of effort is preferred. For these reasons, we have developed several techniques which have greatly facilitated the TEM sample preparation.For specific-area analysis, the use of a copper grid with a small hole is found to be very useful. With this small-hole grid technique, TEM sample preparation can be proceeded by well-established conventional methods. The sample is first polished to the area of interest, which is then carefully positioned inside the hole. This polished side is placed against the grid by epoxy Fig. 1 is an optical image of a TEM cross-section after dimpling to light transmission.

The Application of Powder Suspended Dielectric Fluid in Micro-EDM Processes to Reduce Machining Time

2009 ◽  
Vol 1 (3) ◽  
pp. 210-213 ◽  
Author(s):  
Gunawan Prihandana ◽  
Muslim Mahardika ◽  
M. Hamdi ◽  
Kimiyuki Mitsui
Keyword(s):  
Dielectric Fluid ◽  
Micro Edm ◽  
Machining Time

Recent Patents on Micro-EDM Milling

2020 ◽  
Vol 13 (3) ◽  
pp. 219-229
Author(s):  
Baocheng Xie ◽  
Jianguo Liu ◽  
Yongqiu Chen
Keyword(s):  
Electrical Discharge ◽  
Electrical Discharge Machining ◽  
Three Dimensional ◽  
Processing Method ◽  
Electrode Wear ◽  
Micro Edm ◽  
Processing Efficiency ◽  
Processing Methods ◽  
Machining Quality ◽  
Micro Electrical Discharge Machining

Background: Micro-Electrical Discharge Machining (EDM) milling is widely used in the processing of complex cavities and micro-three-dimensional structures, which is a more effective processing method for micro-precision parts. Thus, more attention has been paid on the micro-EDM milling. Objective : To meet the increasing requirement of machining quality and machining efficiency of micro- EDM milling, the processing devices and processing methods of micro-EDM milling are being improved continuously. Methods: This paper reviews various current representative patents related to the processing devices and processing methods of micro-EDM milling. Results: Through summarizing a large number of patents about processing devices and processing methods of micro-EDM milling, the main problems of current development, such as the strategy of electrode wear compensation and the development trends of processing devices and processing methods of micro-EDM milling are discussed. Conclusion: The optimization of processing devices and processing methods of micro-EDM milling are conducive to solving the problems of processing efficiency and quality. More relevant patents will be invented in the future.

The minimum zone fitting and error evaluation for the logarithmic curve based on geometry optimization approximation algorithm

2019 ◽  
Vol 41 (15) ◽  
pp. 4380-4386
Author(s):  
Tu Xianping ◽  
Lei Xianqing ◽  
Ma Wensuo ◽  
Wang Xiaoyi ◽  
Hu Luqing ◽  
...  
Keyword(s):  
Approximation Algorithm ◽  
Evaluation Method ◽  
Geometry Optimization ◽  
Reference Points ◽  
Approximation Technique ◽  
Error Evaluation ◽  
Iterative Approximation ◽  
Logarithmic Curve ◽  
Normal Distance ◽  
Minimum Zone

The minimum zone fitting and error evaluation for the logarithmic curve has important applications. Based on geometry optimization approximation algorithm whilst considering geometric characteristics of logarithmic curves, a new fitting and error evaluation method for the logarithmic curve is presented. To this end, two feature points, to serve as reference, are chosen either from those located on the least squares logarithmic curve or from amongst measurement points. Four auxiliary points surrounding each of the two reference points are then arranged to resemble vertices of a square. Subsequently, based on these auxiliary points, a series of auxiliary logarithmic curves (16 curves) are constructed, and the normal distance and corresponding range of values between each measurement point and all auxiliary logarithmic curves are calculated. Finally, by means of an iterative approximation technique consisting of comparing, evaluating, and changing reference points; determining new auxiliary points; and constructing corresponding auxiliary logarithmic curves, minimum zone fitting and evaluation of logarithmic curve profile errors are implemented. The example results show that the logarithmic curve can be fitted, and its profile error can be evaluated effectively and precisely using the presented method.

Optimization of micro EDM parameters for fabrication of micro rod

2021 ◽  
Author(s):  
Amit Kumar Singh ◽  
M. Ashok Kumar ◽  
Rahul Kumar ◽  
M. Chandrasekaran
Keyword(s):  
Micro Edm
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