Edge chipping in rotary ultrasonic machining of silicon

2012 ◽  
Vol 7 (3) ◽  
pp. 311 ◽  
Author(s):  
W.L. Cong ◽  
Q. Feng ◽  
Z.J. Pei ◽  
T.W. Deines ◽  
C. Treadwell
Author(s):  
Palamandadige Fernando ◽  
Meng Zhang ◽  
Zhijian Pei ◽  
Adam Owens

Abstract The aim of this study is to investigate the edge chipping and surface roughness of basalt rock processed by rotary ultrasonic machining (RUM) using compressed air as coolant. Basalt rock is commonly used as a building and construction material for foundations and dams, as well as in architectural designs such as constructing thin veneers and facades. Rotary ultrasonic machining, a hybrid process of grinding and ultrasonic machining, is employed to drill difficult-to-machine materials such as ceramics, composites, titanium alloys, stainless steel, etc. RUM has many advantages over conventional machining processes such as twist drilling. These advantages include lower cutting force, higher surface quality, lower tool wear, etc. This paper is the first in literature to report a study on edge chipping and surface roughness on RUM of basalt rock using cold compressed air as coolant. The effects of three input variables (tool rotation speed, feedrate, and ultrasonic power) on cutting force, torque, edge chipping, and surface roughness were studied. Experimental results obtained from this investigation show that RUM with cold air as the coolant has the capability to machine holes in basalt rock with a surface roughness of less than 3.5 μm without severe edge chipping.


Author(s):  
Milan Naď ◽  
Lenka Čičmancová ◽  
Štefan Hajdu

Abstract Rotary ultrasonic machining (RUM) is a hybrid process that combines diamond grinding with ultrasonic machining. It is most suitable to machine hard brittle materials such as ceramics and composites. Due to its excellent machining performance, RUM is very often applied for drilling of hard machinable materials. In the final phase of drilling, the edge deterioration of the drilled hole can occur, which results in a phenomenon called edge chipping. During hole drilling, a change in the thickness of the bottom of the drilled hole occurs. Consequently, the bottom of the hole as a plate structure is exposed to the transfer through the resonance state. This resonance state can be considered as one of the important aspects leading to edge chipping. Effects of changes in the bottom thickness and as well as the fillet radius between the wall and bottom of the borehole on the stress-strain states during RUM are analyzed.


2006 ◽  
Vol 532-533 ◽  
pp. 969-972 ◽  
Author(s):  
Yu Chen ◽  
Zhi Jian Pei ◽  
Clyde Treadwell

This paper reports two investigations on the edge chipping in rotary ultrasonic machining using finite element analysis (FEA). The first FEA investigation establishes a relationship between edge chipping thickness and cutting force. The second FEA investigation is to understand the effects of three parameters (cutting depth, support length, and pre-tightening load) on edge chipping thickness. The investigation results showed that the edge chipping thickness could be reduced by increasing support length and decreasing cutting force.


Author(s):  
Yingbin Hu ◽  
Hui Wang ◽  
Fuda Ning ◽  
Weilong Cong ◽  
Yuzhou Li

BK7/K9 glass is regarded as a difficult-to-machine material due to its high hardness and high brittleness properties as well as high tool wear rate during machining. Facing to these challenges, an efficient and effective rotary ultrasonic machining (RUM) process, consisting of grinding process and ultrasonic machining process, was provided to process BK7/K9 glass. In this investigation, the effects of ultrasonic power on cutting forces, torque, and edge chipping of surface grinding in RUM of BK7/K9 glass were studied. Results showed that, by introducing ultrasonic vibration to surface grinding process, both cutting forces in feeding direction and in axial direction as well as torque values were reduced. The higher the ultrasonic power was, the lower the forces and torque values would be. Edge chipping, which was detrimental to the qualities of machined slots and would cause high machining cost, was significant reduced with the help of ultrasonic vibration.


2013 ◽  
Vol 589-590 ◽  
pp. 523-528 ◽  
Author(s):  
Cheng Long Zhang ◽  
Ping Fa Feng ◽  
Zhi Jian Pei ◽  
Wei Long Cong

Sapphire, widely used in high-speed integrated-circuit chips, thin-film substrates, and various electronic components, is regarded as one of the most difficult to cut materials owing to its great hardness and low fracture toughness. Rotary ultrasonic machining (RUM) has been regarded as an effective processing method for hard and brittle materials. In this paper, RUM process is introduced into the drilling of sapphire for the first time. The feasibility to machine sapphire using RUM is studied. Moreover, results of a designed experimental study into RUM of sapphire are presented to discuss the main effects as well as interaction effects of process parameters (ultrasonic power, spindle speed, and feedrate) on outputs. The process outputs investigated include cutting force and edge chipping size.


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