A new micro-fabrication process simulator for micro-electro-mechanical system (MEMS) designs

2008 ◽  
Vol 1 (4) ◽  
pp. 360
Author(s):  
Alper Yildirim ◽  
Melik Dolen
Keyword(s):  
Mechanical System ◽  
Micro Electro Mechanical System ◽  
Fabrication Process ◽  
Micro Fabrication ◽  
Process Simulator

scholarly journals A bibliometric analysis of micro electro mechanical system energy harvester research

Heliyon ◽  
2021 ◽  
Vol 7 (3) ◽  
pp. e06406
Author(s):  
Ida Hamidah ◽  
Roer Eka Pawinanto ◽  
Budi Mulyanti ◽  
Jumril Yunas
Keyword(s):  
Mechanical System ◽  
Bibliometric Analysis ◽  
Energy Harvester ◽  
Micro Electro Mechanical System ◽  
System Energy

On-Chip Micro–Electro–Mechanical System Fourier Transform Infrared (MEMS FT-IR) Spectrometer-Based Gas Sensing

2016 ◽  
Vol 70 (5) ◽  
pp. 897-904 ◽  
Author(s):  
Mazen Erfan ◽  
Yasser M Sabry ◽  
Mohammad Sakr ◽  
Bassem Mortada ◽  
Mostafa Medhat ◽  
...  
Keyword(s):  
Fourier Transform ◽  
Mechanical System ◽  
Gas Sensing ◽  
Fourier Transform Infrared ◽  
Micro Electro Mechanical System ◽  
Ft Ir ◽  
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A piezoelectric micro-electro-mechanical system vector sensor with a mushroom-shaped proof mass for a dipole beam pattern

2021 ◽  
Vol 332 ◽  
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Author(s):  
Ara Yeon ◽  
Hong Goo Yeo ◽  
Yongrae Roh ◽  
Kyungseop Kim ◽  
Hee-Seon Seo ◽  
...  
Keyword(s):  
Mechanical System ◽  
Proof Mass ◽  
Micro Electro Mechanical System ◽  
Beam Pattern ◽  
Vector Sensor

Micro-electro-mechanical system (MEMS) component research and development for army missile applications

1999 ◽  
Author(s):  
Tracy D. Hudson ◽  
Deanna K. McMillen ◽  
Paul R. Ashley ◽  
Paul B. Ruffin ◽  
Janet Baeder
Keyword(s):  
Research And Development ◽  
Mechanical System ◽  
Micro Electro Mechanical System
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