Fabrication and characterization of hafnium oxide films prepared by direct sputtering

2003 ◽  
Author(s):  
Nian Zhan
Keyword(s):  
Hafnium Oxide ◽  
Oxide Films ◽  
Fabrication And Characterization

Deposition and electrical characterization of hafnium oxide films on silicon

2008 ◽  
Vol 5 (12) ◽  
pp. 3720-3723 ◽  
Author(s):  
E. Verrelli ◽  
D. Tsoukalas ◽  
D. Kouvatsos
Keyword(s):  
Hafnium Oxide ◽  
Oxide Films ◽  
Electrical Characterization

Characterization of Ultra-Thin Hafnium Oxide Films Grown on Silicon by Atomic Layer Deposition Using Tetrakis(ethylmethyl-amino) Hafnium and Water Precursors

2007 ◽  
Vol 19 (13) ◽  
pp. 3127-3138 ◽  
Author(s):  
Y. Wang ◽  
M.-T. Ho ◽  
L. V. Goncharova ◽  
L. S. Wielunski ◽  
S. Rivillon-Amy ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Hafnium Oxide ◽  
Oxide Films ◽  
Atomic Layer ◽  
Layer Deposition

Chemical vapor deposition and characterization of hafnium oxide films

2008 ◽  
Vol 69 (2-3) ◽  
pp. 685-687 ◽  
Author(s):  
T.P. Smirnova ◽  
L.V. Yakovkina ◽  
V.N. Kitchai ◽  
V.V. Kaichev ◽  
Yu.V. Shubin ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Hafnium Oxide ◽  
Oxide Films ◽  
Chemical Vapor

Synthesis and characterization of hafnium oxide films for thermo and photoluminescence applications

2010 ◽  
Vol 68 (4-5) ◽  
pp. 696-699 ◽  
Author(s):  
J. Guzmán Mendoza ◽  
M.A. Aguilar Frutis ◽  
G. Alarcón Flores ◽  
M. García Hipólito ◽  
A. Maciel Cerda ◽  
...  
Keyword(s):  
Hafnium Oxide ◽  
Oxide Films ◽  
Synthesis And Characterization
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