scholarly journals Examination of Errors in Windings for Magnetic Levitation Motors with Flexible PCB

2021 ◽  
Vol 29 (2) ◽  
pp. 453-458
Author(s):  
Ryo INOMATA ◽  
Nobuyuki KURITA ◽  
Takashi OKAYASU ◽  
GRUBER Wolfgang
Keyword(s):  
Magnetic Levitation ◽  
Flexible Pcb

A Micro Conveyance Actuator based on Superconducting Magnetic Levitation

1999 ◽  
Vol 119 (8-9) ◽  
pp. 417-423 ◽  
Author(s):  
Iizuka Tetsuhiko ◽  
Fujita Hiroyuki
Keyword(s):  
Magnetic Levitation

scholarly journals Movement Control Method of Magnetic Levitation System Using Eccentricity of Non-Contact Position Sensor

2021 ◽  
Vol 11 (5) ◽  
pp. 2396
Author(s):  
Jong Suk Lim ◽  
Hyung-Woo Lee
Keyword(s):  
Motor System ◽  
Control Method ◽  
Magnetic Levitation ◽  
Movement Control ◽  
Position Sensor ◽  
Semiconductor Wafer ◽  
Control Command ◽  
Levitation System ◽  
Magnetic Levitation System ◽  
Contact Position

This paper presents a method of utilizing a non-contact position sensor for the tilting and movement control of a rotor in a rotary magnetic levitation motor system. This system has been studied with the aim of having a relatively simple and highly clean alternative application compared to the spin coater used in the photoresist coating process in the semiconductor wafer process. To eliminate system wear and dust problems, a shaft-and-bearing-free magnetic levitation motor system was designed and a minimal non-contact position sensor was placed. An algorithm capable of preventing derailment and precise movement control by applying only control without additional mechanical devices to this magnetic levitation system was proposed. The proposed algorithm was verified through simulations and experiments, and the validity of the algorithm was verified by deriving a precision control result suitable for the movement control command in units of 0.1 mm at 50 rpm rotation drive.

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