Development of a New Nonevaporable Getter Coating Using Oxygen-Free Palladium/Titanium, Surface Analysis by Synchrotron Radiation X-ray Photoelectron Spectroscopy, Residual Gas Analysis, and Evaluation of Pumping Speeds
Keyword(s):
X Ray
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2007 ◽
Vol 111
(40)
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pp. 11850-11857
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2017 ◽
Vol 3
(6)
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pp. 882-889
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Keyword(s):