scholarly journals X-ray Photoemission Spectroscopy Studies of Indium-tin-oxide Films Treated by Oxygen Plasma Immersion Ion Implantation

2012 ◽  
Author(s):  
Long He ◽  
Xiaoxuan Fan ◽  
Qiongrong Ou ◽  
Rongqing Liang
Keyword(s):  
Ion Implantation ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxygen Plasma ◽  
Oxide Films ◽  
Photoemission Spectroscopy ◽  
X Ray ◽  
Plasma Immersion Ion Implantation ◽  
Spectroscopy Studies ◽  
Tin Oxide Films

An investigation of distribution parameters for fluorine ion implantation in indium-tin-oxide films

2005 ◽  
Vol 81 (3) ◽  
pp. 635-638 ◽  
Author(s):  
X. Liu ◽  
Y. Xia ◽  
F. Li ◽  
Z. Tan ◽  
B. Huang ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxide Films ◽  
Distribution Parameters ◽  
Tin Oxide Films

X-ray study of tin oxide films obtained by reactive DC sputtering from a metallic tin target in pure oxygen plasma

2007 ◽  
Vol 201 (8) ◽  
pp. 4659-4665 ◽  
Author(s):  
A. Martel ◽  
F. Caballero-Briones ◽  
P. Quintana ◽  
P. Bartolo-Pérez ◽  
J.L. Peña
Keyword(s):  
Tin Oxide ◽  
Oxygen Plasma ◽  
Oxide Films ◽  
Pure Oxygen ◽  
X Ray ◽  
Dc Sputtering ◽  
Tin Oxide Films

Work Function Enhancement of Indium Tin Oxide via Oxygen Plasma Immersion Ion Implantation

2013 ◽  
Vol 15 (8) ◽  
pp. 791-793 ◽  
Author(s):  
Huanzhong Gao ◽  
Long He ◽  
Zhijiang He ◽  
Zebin Li ◽  
Zhonghang Wu ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Work Function ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxygen Plasma ◽  
Plasma Immersion Ion Implantation

Surface modification of indium tin oxide by oxygen plasma immersion ion implantation

2013 ◽  
Vol 56 (4) ◽  
pp. 925-929 ◽  
Author(s):  
WeiHai Cheng ◽  
Long He ◽  
XiaoXuan Fan ◽  
QiongRong Ou ◽  
RongQing Liang
Keyword(s):  
Surface Modification ◽  
Ion Implantation ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxygen Plasma ◽  
Plasma Immersion Ion Implantation
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