Investigation into inhomogeneous electrical and optical properties of indium tin oxide film using spectroscopic ellipsometry with multi-layer optical models

Kun-San Tseng; Yu-Lung Lo

doi:10.1364/ome.4.000043

Investigation into inhomogeneous electrical and optical properties of indium tin oxide film using spectroscopic ellipsometry with multi-layer optical models

Optical Materials Express ◽

10.1364/ome.4.000043 ◽

2013 ◽

Vol 4 (1) ◽

pp. 43 ◽

Cited By ~ 5

Author(s):

Kun-San Tseng ◽

Yu-Lung Lo

Keyword(s):

Optical Properties ◽

Oxide Film ◽

Tin Oxide ◽

Spectroscopic Ellipsometry ◽

Indium Tin Oxide ◽

Electrical And Optical Properties

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Application of Spectroscopic Ellipsometry for the Study of Electrical and Optical Properties of Indium Tin Oxide Thin Films

Acta Optica Sinica ◽

10.3788/aos201434.1031003 ◽

2014 ◽

Vol 34 (10) ◽

pp. 1031003

Author(s):

胡慧 Hu Hui ◽

张丽平 Zhang Liping ◽

孟凡英 Meng Fanying ◽

刘正新 Liu Zhengxin

Keyword(s):

Thin Films ◽

Optical Properties ◽

Tin Oxide ◽

Spectroscopic Ellipsometry ◽

Indium Tin Oxide ◽

Oxide Thin Films ◽

Electrical And Optical Properties

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Thickness Dependence of Electrical and Optical Properties of Indium Tin Oxide Film Deposited by Radio Frequency Magnetron Sputtering

International Photonics and Optoelectronics Meetings (POEM) ◽

10.1364/aoee.2013.asa3a.24 ◽

2013 ◽

Author(s):

Ge Wang ◽

Lei Zhao ◽

Hongwei Diao ◽

Jingwei Chen ◽

Baojun Yan ◽

...

Keyword(s):

Optical Properties ◽

Oxide Film ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Radio Frequency Magnetron ◽

Thickness Dependence ◽

Radio Frequency Magnetron Sputtering ◽

Electrical And Optical Properties

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Spectroscopic ellipsometry characterization of indium tin oxide film microstructure and optical constants

Thin Solid Films ◽

10.1016/s0040-6090(97)00853-5 ◽

1998 ◽

Vol 313-314 ◽

pp. 394-397 ◽

Cited By ~ 198

Author(s):

R.A Synowicki

Keyword(s):

Oxide Film ◽

Tin Oxide ◽

Spectroscopic Ellipsometry ◽

Indium Tin Oxide ◽

Optical Constants ◽

Film Microstructure

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Effect of annealing varied temperature on electrical and optical properties of indium tin oxide films at oxygen atmosphere

2009 6th International Conference on Electrical Engineering/Electronics, Computer, Telecommunications and Information Technology ◽

10.1109/ecticon.2009.5137054 ◽

2009 ◽

Author(s):

I. Srithanachai ◽

S. Niemcharoen ◽

S. Ueamanapong ◽

K. Nutaman ◽

N. Atiwongsangthong

Keyword(s):

Optical Properties ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Oxygen Atmosphere ◽

Electrical And Optical Properties ◽

Varied Temperature ◽

Tin Oxide Films

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Electrical and optical properties of indium tin oxide/epoxy composite film

Chinese Physics B ◽

10.1088/1674-1056/23/7/076403 ◽

2014 ◽

Vol 23 (7) ◽

pp. 076403 ◽

Cited By ~ 2

Author(s):

Xia Guo ◽

Chun-Wei Guo ◽

Yu Chen ◽

Zhi-Ping Su

Keyword(s):

Optical Properties ◽

Composite Film ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Epoxy Composite ◽

Electrical And Optical Properties

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Electrical and optical properties of sputtered ultra-thin indium tin oxide films using xenon/argon gas

Journal of Materials Science Materials in Electronics ◽

10.1007/s10854-019-01171-w ◽

2019 ◽

Vol 30 (9) ◽

pp. 8508-8514

Author(s):

F. Hamouda ◽

E. Herth ◽

C. David ◽

F. Bayle ◽

M. P. Plante ◽

...

Keyword(s):

Optical Properties ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Electrical And Optical Properties ◽

Argon Gas ◽

Tin Oxide Films

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Structural, electrical and optical properties of indium tin oxide thin films prepared by RF sputtering using different density ceramic targets

Vacuum ◽

10.1016/j.vacuum.2011.11.008 ◽

2012 ◽

Vol 86 (8) ◽

pp. 1045-1047 ◽

Cited By ~ 12

Author(s):

Wei Zhang ◽

Guisheng Zhu ◽

Li Zhi ◽

Huijuan Yang ◽

Zupei Yang ◽

...

Keyword(s):

Thin Films ◽

Optical Properties ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Rf Sputtering ◽

Oxide Thin Films ◽

Electrical And Optical Properties ◽

Ceramic Targets

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Electrical and optical properties of indium tin oxide films prepared on plastic substrates by radio frequency magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2007.05.093 ◽

2008 ◽

Vol 516 (8) ◽

pp. 1984-1991 ◽

Cited By ~ 54

Author(s):

Chih-hao Yang ◽

Shih-chin Lee ◽

Tien-chai Lin ◽

Suz-cheng Chen

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Radio Frequency Magnetron Sputtering ◽

Electrical And Optical Properties ◽

Plastic Substrates ◽

Tin Oxide Films

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Electrical and optical properties of indium tin oxide thin films deposited on unheated substrates by d.c. reactive sputtering

Thin Solid Films ◽

10.1016/0040-6090(93)90737-a ◽

1993 ◽

Vol 223 (1) ◽

pp. 135-139 ◽

Cited By ~ 133

Author(s):

T. Karasawa ◽

Y. Miyata

Keyword(s):

Thin Films ◽

Optical Properties ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Reactive Sputtering ◽

Oxide Thin Films ◽

Electrical And Optical Properties

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Effect of annealing on electrical and optical properties of RF magnetron sputtered indium tin oxide films

Applied Surface Science ◽

10.1016/0169-4332(93)90233-2 ◽

1993 ◽

Vol 68 (4) ◽

pp. 497-504 ◽

Cited By ~ 72

Author(s):

Wen-Fa Wu ◽

Bi-Shiou Chiou

Keyword(s):

Optical Properties ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Electrical And Optical Properties ◽

Tin Oxide Films

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