Precise optical surface profilometry using innovative chromatic differential confocal microscopy

Liang-Chia Chen; Duc Trung Nguyen; Yi-Wei Chang

doi:10.1364/ol.41.005660

Precise optical surface profilometry using innovative chromatic differential confocal microscopy

Optics Letters ◽

10.1364/ol.41.005660 ◽

2016 ◽

Vol 41 (24) ◽

pp. 5660 ◽

Cited By ~ 13

Author(s):

Liang-Chia Chen ◽

Duc Trung Nguyen ◽

Yi-Wei Chang

Keyword(s):

Confocal Microscopy ◽

Optical Surface ◽

Surface Profilometry

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Optical surface profilometry of low reflectance materials – Evaluation as a laser processing diagnostic

Pacific International Conference on Applications of Lasers and Optics ◽

10.2351/1.5056972 ◽

2006 ◽

Cited By ~ 3

Author(s):

Adam M. Joyce ◽

Deborah M. Kane ◽

Richard J. Chater

Keyword(s):

Laser Processing ◽

Optical Surface ◽

Surface Profilometry

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Development of white light confocal microscopy with innovative fringe projection for full-field micro surface profilometry

IEEE International Conference on Mechatronics, 2005. ICM '05. ◽

10.1109/icmech.2005.1529273 ◽

2005 ◽

Cited By ~ 1

Author(s):

Liang-Chia Chen ◽

Wei-Jei Kao

Keyword(s):

Confocal Microscopy ◽

White Light ◽

Fringe Projection ◽

Full Field ◽

Surface Profilometry

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Nanometrology of sub-wavelength circular holes in gold nanofilms using optical surface profilometry

2013 Conference on Lasers & Electro-Optics Europe & International Quantum Electronics Conference CLEO EUROPE/IQEC ◽

10.1109/cleoe-iqec.2013.6801238 ◽

2013 ◽

Author(s):

D. J. Little ◽

D. M. Kane

Keyword(s):

Optical Surface ◽

Surface Profilometry ◽

Circular Holes ◽

Sub Wavelength

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Confocal Microscopy for Surface Profilometry

Precision Manufacturing - Metrology ◽

10.1007/978-981-10-4938-5_3 ◽

2019 ◽

pp. 59-92

Author(s):

Liang-Chia Chen

Keyword(s):

Confocal Microscopy ◽

Surface Profilometry

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OPTICAL SURFACE PROFILOMETRY OF LOW REFLECTANCE MATERIALS – EVALUATION AS A LASER PROCESSING DIAGNOSTIC

Laser Cleaning II ◽

10.1142/9789812706843_0015 ◽

2007 ◽

pp. 271-289

Author(s):

D. M. KANE ◽

A. M. JOYCE ◽

R. J. CHATER

Keyword(s):

Laser Processing ◽

Optical Surface ◽

Surface Profilometry

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Optical surface profilometry and AFM of Orb weaver spider silks

2010 International Conference on Nanoscience and Nanotechnology ◽

10.1109/iconn.2010.6045264 ◽

2010 ◽

Author(s):

D. M. Kane ◽

G. R. Staib ◽

N. Naidoo ◽

A. M. Joyce ◽

J. R. Rabeau ◽

...

Keyword(s):

Optical Surface ◽

Surface Profilometry ◽

Spider Silks

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Confocal Microscopy for Surface Profilometry

Precision Manufacturing - Metrology ◽

10.1007/978-981-10-4912-5_3-1 ◽

2019 ◽

pp. 1-34

Author(s):

Liang-Chia Chen

Keyword(s):

Confocal Microscopy ◽

Surface Profilometry

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Optical surface profilometry using Fresnel diffraction from a 2D array of reflective phase-steps

Frontiers in Optics 2016 ◽

10.1364/fio.2016.jth2a.1 ◽

2016 ◽

Author(s):

P. Asgari ◽

Y. Pourvais ◽

A. Darudi

Keyword(s):

Fresnel Diffraction ◽

Optical Surface ◽

Surface Profilometry ◽

2D Array

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Characterization of Process Induced Surface Profiles and Lattice Strains using Optical Surface Profilometry and Multi-wavelength Raman Spectroscopy

ECS Meeting Abstracts ◽

10.1149/ma2008-01/16/660 ◽

2008 ◽

Keyword(s):

Raman Spectroscopy ◽

Optical Surface ◽

Surface Profilometry ◽

Lattice Strains ◽

Multi Wavelength ◽

Surface Profiles

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Accurate optical surface profilometry

SPIE Newsroom ◽

10.1117/2.1201312.005282 ◽

2014 ◽

Author(s):

Quang Duc Pham ◽

Yoshio Hayasaki

Keyword(s):

Optical Surface ◽

Surface Profilometry

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