Writing waveguides inside monolithic crystalline silicon with nanosecond laser pulses

2016 ◽  
Vol 41 (21) ◽  
pp. 4875 ◽  
Author(s):  
M. Chambonneau ◽  
Q. Li ◽  
M. Chanal ◽  
N. Sanner ◽  
D. Grojo
Keyword(s):  
Crystalline Silicon ◽  
Laser Pulses ◽  
Nanosecond Laser ◽  
Nanosecond Laser Pulses

Silicon Wafer Microstructure Fabrication Using Nanosecond Laser Pulses

2012 ◽  
Vol 476-478 ◽  
pp. 1798-1801
Author(s):  
De Fu Xu ◽  
Shao Quan Yin ◽  
Zhi Gang Xiao ◽  
Xiao Xiao
Keyword(s):  
Optical Properties ◽  
Silicon Wafer ◽  
Crystalline Silicon ◽  
Incident Light ◽  
Laser Pulses ◽  
Nanosecond Laser ◽  
Short Pulses ◽  
Microstructure Fabrication ◽  
Nanosecond Laser Pulses ◽  
Ambient Gas

In this paper, we created some microstructures on the surface of silicon by irradiating a silicon wafer for soalr cell with trains of short pulses in the presence of an ambient gas.The laser pulse produced by TEA CO2 laser is high power and shorter than a microsecond in duration. We found that the morphology of the structures is highly dependent on the species of ambient gas and the number of laser pulses used. I note that surfaces covered with these microstructures have striking optical properties: structures absorb approximately 90% of incident light with wavelengths between 250 nm and 0.85μm.The remarkable and potentially useful optical properties of the structures should be beneficial in increasing the efficiency of crystalline silicon soalr cell.

Formation of Periodical Sub-Micron Sized Structures on Silicon by Interfered Nanosecond Laser Pulses

2010 ◽  
Vol 97-101 ◽  
pp. 3803-3806
Author(s):  
Yong Xiang Hu ◽  
Heng Zhang ◽  
Zheng Qiang Yao
Keyword(s):  
Cost Effective ◽  
Laser Pulses ◽  
Laser Beams ◽  
Nanosecond Laser ◽  
Effective Technique ◽  
First Order ◽  
Direct Fabrication ◽  
Cost Effective Technique ◽  
Nanosecond Laser Pulses ◽  
Micro Structuring

Laser interference micro-structuring is a relatively efficient and cost-effective technique for fabricating periodical micro-nano-structuring surfaces. The direct fabrication of sub-micron sized dot array on silicon was performed by four interfering nanosecond laser beams with a diffractive beam splitter. The mechanism to form the dot array was analyzed and it was found that the obtained conical dot array had a negative shape of the interference pattern of four laser beams. A second-order peak between two first-order peaks also occurred due to the liquid-solid expansion.

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