scholarly journals Ptychographic imaging with a compact gas–discharge plasma extreme ultraviolet light source

2015 ◽  
Vol 40 (23) ◽  
pp. 5574 ◽  
Author(s):  
M. Odstrcil ◽  
J. Bussmann ◽  
D. Rudolf ◽  
R. Bresenitz ◽  
Jianwei Miao ◽  
...  
Keyword(s):  
Light Source ◽  
Ultraviolet Light ◽  
Discharge Plasma ◽  
Extreme Ultraviolet ◽  
Gas Discharge ◽  
Gas Discharge Plasma ◽  
Extreme Ultraviolet Light

Interferometric broadband Fourier spectroscopy with a partially coherent gas-discharge extreme ultraviolet light source

2015 ◽  
Vol 40 (12) ◽  
pp. 2818 ◽  
Author(s):  
Denis Rudolf ◽  
Jan Bußmann ◽  
Michal Odstrčil ◽  
Minjie Dong ◽  
Klaus Bergmann ◽  
...  
Keyword(s):  
Light Source ◽  
Ultraviolet Light ◽  
Extreme Ultraviolet ◽  
Gas Discharge ◽  
Fourier Spectroscopy ◽  
Partially Coherent ◽  
Extreme Ultraviolet Light

High-radiance extreme-ultraviolet light source for actinic inspection and metrology

2012 ◽  
Vol 11 (2) ◽  
pp. 021107-1 ◽  
Author(s):  
Peter Choi ◽  
Sergey V. Zakharov ◽  
Raul Aliaga-Rossel ◽  
Aldrice Bakouboula ◽  
Otman Benali ◽  
...  
Keyword(s):  
Light Source ◽  
Ultraviolet Light ◽  
Extreme Ultraviolet ◽  
Extreme Ultraviolet Light
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