After the technologies of measurement for thin-film thickness were analyzed, the method of real-time measurement for coating thickness based on quartz crystal oscillation was proposed. The principle of the thickness measured by frequency shifting was analyzed on theory, the functional relationship between the resonant frequency shifting and the film thickness changing was deduced. Aim at the complicated working condition in coating machine, the structure of the measuring system for reducing the influence from external pressure and temperature was designed. The circuit for detecting the frequency shift was designed. Final, according to the experiment result, the resolution of thickness measurement can achieve sub-micrometer level.
Live Demonstration: A Portable Microsensor Fusion System with Real-Time Measurement for On-Site Beverage Tasting