Misalignment sensing with a moiré beat signal for nanolithography

2020 ◽  
Vol 45 (7) ◽  
pp. 1762
Author(s):  
Nan Wang ◽  
Wei Jiang ◽  
Yu Zhang
Keyword(s):  
IEEE Access ◽  
2021 ◽  
pp. 1-1
Author(s):  
Lars Grundhofer ◽  
Stefan Gewies ◽  
Giovanni Del Galdo

2021 ◽  
Vol 12 (1) ◽  
Author(s):  
Lars Liebermeister ◽  
Simon Nellen ◽  
Robert B. Kohlhaas ◽  
Sebastian Lauck ◽  
Milan Deumer ◽  
...  

AbstractBroadband terahertz spectroscopy enables many promising applications in science and industry alike. However, the complexity of existing terahertz systems has as yet prevented the breakthrough of this technology. In particular, established terahertz time-domain spectroscopy (TDS) schemes rely on complex femtosecond lasers and optical delay lines. Here, we present a method for optoelectronic, frequency-modulated continuous-wave (FMCW) terahertz sensing, which is a powerful tool for broadband spectroscopy and industrial non-destructive testing. In our method, a frequency-swept optical beat signal generates the terahertz field, which is then coherently detected by photomixing, employing a time-delayed copy of the same beat signal. Consequently, the receiver current is inherently phase-modulated without additional modulator. Owing to this technique, our broadband terahertz spectrometer performs (200 Hz measurement rate, or 4 THz bandwidth and 117 dB peak dynamic range with averaging) comparably to state-of-the-art terahertz-TDS systems, yet with significantly reduced complexity. Thickness measurements of multilayer dielectric samples with layer-thicknesses down to 23 µm show its potential for real-world applications. Within only 0.2 s measurement time, an uncertainty of less than 2 % is achieved, the highest accuracy reported with continuous-wave terahertz spectroscopy. Hence, the optoelectronic FMCW approach paves the way towards broadband and compact terahertz spectrometers that combine fiber optics and photonic integration technologies.


2020 ◽  
pp. 28-33
Author(s):  
E.S. Belyaev ◽  
A.V. Vanyagin ◽  
B.A. Gordeev ◽  
V.I. Erofeev ◽  
S.N. Okhulkov

A frequency method for measuring the dynamic viscosity of rheological media is described using the example of a magnetorheological fluid. The method is based on the principle of operation of a rotary viscometer, in which the torsion angle depends on the characteristics of the viscoelastic medium. Keywords frequency method, dynamic viscosity, torque, beat signal, methodical error, resolution, accuracy, twist angle, torsion. [email protected]; [email protected]


2012 ◽  
Vol 32 (4) ◽  
pp. 0403001 ◽  
Author(s):  
刘立生 Liu Lisheng ◽  
张合勇 Zhang Heyong ◽  
赵帅 Zhao Shuai ◽  
郭劲 Guo Jin

2009 ◽  
Vol 36 (4) ◽  
pp. 895-900
Author(s):  
张丽梅 Zhang Limei ◽  
王智 Wang Zhi ◽  
余贶琭 Yu Kuanglu ◽  
吴重庆 Wu Chongqing

2017 ◽  
Vol 44 (6) ◽  
pp. 0604006
Author(s):  
杨奕 Yang Yi ◽  
孙青 Sun Qing ◽  
邓玉强 Deng Yuqiang ◽  
冯美琦 Feng Meiqi ◽  
赵昆 Zhao Kun

2020 ◽  
Vol 10 (4) ◽  
pp. 291-297
Author(s):  
Weiren Cheng ◽  
Tianming Luo ◽  
Linghao Cheng ◽  
Hao Liang ◽  
Bai-ou Guan

Abstract A compact fiber-optic magnetic field sensor is proposed by packaging an orthogonal dual-frequency fiber grating laser and a copper wire with alternating electrical current together inside epoxy resin. The alternating current generates Ampere force in a magnetic field, which changes the birefringence of the fiber laser and hence tunes the frequency of the beat signal after photodetection. The magnetic field magnitude can then be detected by measuring the frequency change of the beat signal. The sensitivity of the sensor can be tuned with a maximum response of 35.21 kHz/kGs demonstrated. Moreover, the sensor shows good immunity to environment interference.


Author(s):  
Asiah Maryam Md Noor ◽  
Idnin Pasya ◽  
Nur Emileen Abd Rashid ◽  
Raja Syamsul Azmir Raja Abdullah

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