Trimming of high-Q-factor silicon ring resonators by electron beam bleaching

2012 ◽  
Vol 37 (15) ◽  
pp. 3114 ◽  
Author(s):  
Stefan Prorok ◽  
Alexander Yu. Petrov ◽  
Manfred Eich ◽  
Jingdong Luo ◽  
Alex K.-Y. Jen
2013 ◽  
Vol 684 ◽  
pp. 443-446
Author(s):  
Chao Liu ◽  
Chen Yang Xue ◽  
Dan Feng Cui ◽  
Jun Bin Zang ◽  
Yong Hua Wang ◽  
...  

We designed High-Q micro-ring resonators based on SOI material. A new method of using a top SiO2 layer to cover the waveguide is applied and the tested Q factor is as high as 1.0135×104. Micro-ring resonator has been fabricated using Electron-Beam Lithography and Inductive Coupled Plasma. OptiFDTD was used to simulate the micro-ring resonator and we compared the transmission spectrum of this resonator with the resonator without SiO2 covering.


2015 ◽  
Vol 23 (15) ◽  
pp. 19969 ◽  
Author(s):  
Pan Ma ◽  
Duk-Yong Choi ◽  
Yi Yu ◽  
Zhiyong Yang ◽  
Khu Vu ◽  
...  
Keyword(s):  
Q Factor ◽  

Author(s):  
Jing-chun Yan ◽  
Shi-qian Zhang ◽  
Yong Zhang ◽  
Yu-lin Wang ◽  
Cheng-ping Huang

Abstract Planar split-ring resonators (SRRs) with broken symmetry, excited by the electric field of incident wave, have been widely used to realize the high-Q resonance. In this paper, we report by theory and experiment an alternative scheme to induce the SRR-based high-Q resonance. The proposed scheme utilizes a two-dimensional array of vertical SRRs with vertical air gaps, which enables the excitation of narrow resonance with magnetic field and strong enhancement of local electromagnetic fields. The working mechanism correlates with the strong directional dependence of the dipole radiation (i.e., the elimination of electric-dipole radiation of the SRRs in the propagation direction), rather than the destructive interference due to the structural symmetry breaking. The dependence of Q factor on the structural parameters has also been studied theoretically, suggesting that a Q factor more than 2000 can be achieved. The results may be useful for designing narrow-band filters and sensors in the microwave or THz regime.


Photonics ◽  
2021 ◽  
Vol 8 (7) ◽  
pp. 256
Author(s):  
Yue-Xin Yin ◽  
Xiao-Pei Zhang ◽  
Xiao-Jie Yin ◽  
Yue Li ◽  
Xin-Ru Xu ◽  
...  

A high-Q-factor tunable silica-based microring resonator (MRR) is demonstrated. To meet the critical-coupling condition, a Mach–Zehnder interferometer (MZI) as the tunable coupler was integrated with a racetrack resonator. Then, 40 mW electronic power was applied on the microheater on the arm of MZI, and a maximal notch depth of about 13.84 dB and a loaded Q factor of 4.47 × 106 were obtained. The proposed MRR shows great potential in practical application for optical communications and integrated optics.


2002 ◽  
Vol 14 (10) ◽  
pp. 1442-1444 ◽  
Author(s):  
D.G. Rabus ◽  
M. Hamacher ◽  
U. Troppenz ◽  
H. Heidrich
Keyword(s):  

Author(s):  
Paolo Vallerotonda ◽  
Fabrizio Cacciamani ◽  
Luca Pelliccia ◽  
Alessandro Cazzorla ◽  
Davide Tiradossi ◽  
...  

Abstract The design and first experimental results of Tx and Rx L-band bandpass filters for a high-power satellite diplexer are presented in this paper. Designed in the framework of an ESA ARTES AT project, the filters are based on TM010 mode dielectric resonators. These resonators allow for better results in terms of volume occupation with respect to other dielectric resonators still maintaining high Q-factor values (>2000). Volume saving above 30% is achieved with respect to standard coaxial filters. The filter geometries and materials have been chosen in order to improve the power-handling and to cope with related critical issues for space applications (i.e. avoid any multipactor discharge in the operating RF power range and low-PIM response). Measurements of Tx filter show good correlation with the design in terms of central frequency, BW, and unloaded Q-factor (almost 3000). Measurements of Rx filter show a worse correlation with the design in terms of filter response shape. This is ascribed to size tolerances of one of the filter resonators. Multiple analyses are ongoing to remove this degradation in the final engineering model.


2014 ◽  
Vol 105 (6) ◽  
pp. 063118 ◽  
Author(s):  
Daquan Yang ◽  
Shota Kita ◽  
Feng Liang ◽  
Cheng Wang ◽  
Huiping Tian ◽  
...  

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