High-sensitivity Fabry–Perot interferometric pressure sensor based on a nanothick silver diaphragm
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2017 ◽
Vol 35
(18)
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pp. 4067-4071
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2019 ◽
Vol 90
(9)
◽
pp. 095002
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Keyword(s):
2013 ◽
Vol 331
◽
pp. 303-306
Keyword(s):