Addressable microlens array for parallel laser microfabrication

2011 ◽  
Vol 36 (12) ◽  
pp. 2302 ◽  
Author(s):  
Patrick S. Salter ◽  
Martin J. Booth
Keyword(s):  
Microlens Array ◽  
Laser Microfabrication

Applications of a microlens array and a photomask to the laser microfabrication of a periodic photopolymer rod array

2007 ◽  
Vol 46 (34) ◽  
pp. 8264 ◽  
Author(s):  
Shigeki Matsuo ◽  
Takashi Miyamoto ◽  
Takuro Tomita ◽  
Shuichi Hashimoto
Keyword(s):  
Microlens Array ◽  
Laser Microfabrication ◽  
Rod Array

scholarly journals Integrated Double-Sided Random Microlens Array Used for Laser Beam Homogenization

Micromachines ◽  
2021 ◽  
Vol 12 (6) ◽  
pp. 673
Author(s):  
Wei Yuan ◽  
Cheng Xu ◽  
Li Xue ◽  
Hui Pang ◽  
Axiu Cao ◽  
...  
Keyword(s):  
Laser Beam ◽  
Microlens Array ◽  
Energy Utilization ◽  
Utilization Rate ◽  
Periodic Lattice ◽  
Lattice Distribution ◽  
Speckle Field ◽  
High Laser ◽  
Alignment Problem ◽  
In Series

Double microlens arrays (MLAs) in series can be used to divide and superpose laser beam so as to achieve a homogenized spot. However, for laser beam homogenization with high coherence, the periodic lattice distribution in the homogenized spot will be generated due to the periodicity of the traditional MLA, which greatly reduces the uniformity of the homogenized spot. To solve this problem, a monolithic and highly integrated double-sided random microlens array (D-rMLA) is proposed for the purpose of achieving laser beam homogenization. The periodicity of the MLA is disturbed by the closely arranged microlens structures with random apertures. And the random speckle field is achieved to improve the uniformity of the homogenized spot by the superposition of the divided sub-beams. In addition, the double-sided exposure technique is proposed to prepare the rMLA on both sides of the same substrate with high precision alignment to form an integrated D-rMLA structure, which avoids the strict alignment problem in the installation process of traditional discrete MLAs. Then the laser beam homogenization experiments have been carried out by using the prepared D-rMLA structure. The laser beam homogenized spots of different wavelengths have been tested, including the wavelengths of 650 nm (R), 532 nm (G), and 405 nm (B). The experimental results show that the uniformity of the RGB homogenized spots is about 91%, 89%, and 90%. And the energy utilization rate is about 89%, 87%, 86%, respectively. Hence, the prepared structure has high laser beam homogenization ability and energy utilization rate, which is suitable for wide wavelength regime.

Fabrication of single-mode circular optofluidic waveguides in fused silica using femtosecond laser microfabrication

2021 ◽  
Vol 141 ◽  
pp. 107118
Author(s):  
Zhengming Liu ◽  
Jian Xu ◽  
Zijie Lin ◽  
Jia Qi ◽  
Xiaolong Li ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Single Mode ◽  
Fused Silica ◽  
Laser Microfabrication ◽  
Optofluidic Waveguides

scholarly journals Research on surface quality difference of Microlens array fabricated by fast tool servo cutting

2021 ◽  
pp. 1-1
Author(s):  
Yuetian Huang ◽  
Shijie Li ◽  
Jin Zhang ◽  
Chen Yang ◽  
Yingxiu Kong ◽  
...  
Keyword(s):  
Surface Quality ◽  
Microlens Array ◽  
Fast Tool Servo ◽  
Quality Difference
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