Interface Stress of Oxide Thin Films Produced by DC Pulse Magnetron Sputtering Deposition

2010 ◽  
Author(s):  
Kun-Hsien Lee ◽  
Chia-Chen Lee ◽  
Chien-Jen Tang ◽  
Cheng-Chung Jaing ◽  
His-Chao Chen ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Interface Stress ◽  
Oxide Thin Films ◽  
Sputtering Deposition ◽  
Pulse Magnetron

Relation between modulation frequency of electric power oscillation during pulse magnetron sputtering deposition of MoNx thin films

2018 ◽  
Vol 456 ◽  
pp. 789-796 ◽  
Author(s):  
Bartosz Wicher ◽  
Rafał Chodun ◽  
Katarzyna Nowakowska-Langier ◽  
Sebastian Okrasa ◽  
Marek Trzciński ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Electric Power ◽  
Modulation Frequency ◽  
Sputtering Deposition ◽  
Power Oscillation ◽  
Pulse Magnetron
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