Properties, Growth and Filter Applications of a-SiN^x:H Alloys Prepared in Pulsed Radiofrequency Plasma

Author(s):  
Richard Vernhes ◽  
Oleg Zabeida ◽  
Jolanta Klemberg-Sapieha ◽  
Ludvik Martinu
2004 ◽  
Vol 17 (2) ◽  
pp. 239 ◽  
Author(s):  
Jun Hak Lee ◽  
Tae Yoon Kim ◽  
Soo Ho Ha ◽  
Young Eun Kwon ◽  
Chae Sik Yoon

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