Surface Characterization of High-End Optical Components using Light Scattering

2017 ◽  
Author(s):  
Sven Schröder ◽  
Marcus Trost ◽  
Tobias Herffurth ◽  
Matthias Hauptvogel ◽  
Mikhail E. Sachkov ◽  
...  
Keyword(s):  
Light Scattering ◽  
Surface Characterization ◽  
Optical Components

Surface characterization of III–V heteroepitaxial systems by laser light scattering

1999 ◽  
Vol 201-202 ◽  
pp. 137-140 ◽  
Author(s):  
M.U González ◽  
J.A Sánchez-Gil ◽  
Y González ◽  
L González ◽  
R Garcı́a ◽  
...  
Keyword(s):  
Light Scattering ◽  
Surface Characterization ◽  
Laser Light ◽  
Laser Light Scattering

scholarly journals Light scattering techniques for the characterization of optical components

2017 ◽  
Author(s):  
S. Schröder ◽  
T. Herffurth ◽  
M. Trost ◽  
T. Weigel ◽  
M. Hauptvogel ◽  
...  
Keyword(s):  
Light Scattering ◽  
Optical Components

Surface characterization of optical components for the DUV, VUV and EUV

2001 ◽  
Vol 57-58 ◽  
pp. 65-70 ◽  
Author(s):  
Angela Duparré ◽  
Igor Kozhevnikov ◽  
Stefan Gliech ◽  
Jörg Steinert ◽  
Gunther Notni
Keyword(s):  
Surface Characterization ◽  
Optical Components

scholarly journals Light scattering characterization of optical components for space applications

2017 ◽  
Author(s):  
S. Schröder ◽  
M. Hauptvogel ◽  
M. Trost ◽  
A. Costille ◽  
D. Penka ◽  
...  
Keyword(s):  
Light Scattering ◽  
Space Applications ◽  
Optical Components

Light scattering characterization of optical components: BRDF, BTDF, and scatter losses

2014 ◽  
Author(s):  
Sven Schröder ◽  
Alexander von Finck ◽  
Dina Katsir ◽  
Uwe Zeitner ◽  
Angela Duparré
Keyword(s):  
Light Scattering ◽  
Optical Components

The Use of Advanced Analytical Techniques for Characterization of the Chemical, Physical, and Crystallographic Nature of a Surface

1973 ◽  
Vol 31 ◽  
pp. 132-133 ◽  
Author(s):  
R. E. Herfert
Keyword(s):  
Surface Characterization ◽  
Analytical Techniques ◽  
X Ray Diffraction ◽  
Depth Of Penetration ◽  
X Ray ◽  
The Past ◽  
Transmission Electron ◽  
Scanning Electron

Studies of the nature of a surface, either metallic or nonmetallic, in the past, have been limited to the instrumentation available for these measurements. In the past, optical microscopy, replica transmission electron microscopy, electron or X-ray diffraction and optical or X-ray spectroscopy have provided the means of surface characterization. Actually, some of these techniques are not purely surface; the depth of penetration may be a few thousands of an inch. Within the last five years, instrumentation has been made available which now makes it practical for use to study the outer few 100A of layers and characterize it completely from a chemical, physical, and crystallographic standpoint. The scanning electron microscope (SEM) provides a means of viewing the surface of a material in situ to magnifications as high as 250,000X.

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