Characterization of Photoresist and Study on Developed Resist Profile for the Fabrication of Gray-Scale Diffractive Optic Elements
1997 ◽
Vol 26
(6)
◽
pp. 332-336
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1994 ◽
Vol 13
(11)
◽
pp. 835-840
◽
2006 ◽
Vol 47
(2)
◽
pp. 192-198
◽
Keyword(s):
Keyword(s):
2005 ◽
Vol 46
(5)
◽
pp. 404-410
◽
Keyword(s):
Keyword(s):