Micromachined three-dimensional microgratings for free-space integrated micro-optics
1994 ◽
Vol 6
(12)
◽
pp. 1445-1447
◽
2019 ◽
Vol 16
(6)
◽
pp. 172988141988674
Keyword(s):
2019 ◽
Vol 11
(8)
◽
pp. 8685-8692
◽
2002 ◽
Vol 202
(4-6)
◽
pp. 319-329
◽
1992 ◽
Vol 24
(1)
◽
pp. 27-32
◽
Keyword(s):
1995 ◽
Vol 50
(1-2)
◽
pp. 127-134
◽
Keyword(s):