Nanometric displacement sensor with switchable measuring range using a cylindrical vector beam excited silicon nanoantenna
2021 ◽
Vol 1745
◽
pp. 012013
2007 ◽
Vol 364-366
◽
pp. 750-755
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Keyword(s):
2019 ◽
Vol 46
(5)
◽
pp. 0508023
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