Integrated Si₃N₄ microresonator-based quantum light sources with high brightness using a subtractive wafer-scale platform
1998 ◽
Vol 5
(3)
◽
pp. 168-175
◽
Keyword(s):
Keyword(s):
2017 ◽
Vol 7
(5)
◽
pp. 2434
◽
Keyword(s):