scholarly journals Prevention of laser damage precursors in spaceborne ultraviolet antireflection coatings

2021 ◽  
Vol 29 (10) ◽  
pp. 14189
Author(s):  
Thimotheus Alig ◽  
Nils Bartels ◽  
Paul Allenspacher ◽  
Istvan Balasa ◽  
Tammo Böntgen ◽  
...  
2011 ◽  
Vol 50 (9) ◽  
pp. C340 ◽  
Author(s):  
John Bellum ◽  
Damon Kletecka ◽  
Patrick Rambo ◽  
Ian Smith ◽  
Jens Schwarz ◽  
...  

Author(s):  
Brennan Davis ◽  
Wilson Chi

Abstract The use of an antireflection coating for backside semiconductor failure analysis is discussed. The process of selecting an appropriate coating is described. Several known coatings are also described in regards to imaging quality, material properties, and the benefits to device analysis applications.


2004 ◽  
Author(s):  
Leonid B. Glebov ◽  
Larissa N. Glebova ◽  
Vadim I. Smirnov ◽  
Mark Dubinskii ◽  
Larry D. Merkle ◽  
...  

1996 ◽  
Vol 24 (8) ◽  
pp. 906-909
Author(s):  
Akio MIYAMOTO ◽  
Hidetsugu YOSHIDA ◽  
Yusuke MORI ◽  
Takatomo SASAKI ◽  
Sadao NAKAI

1996 ◽  
Vol 32 (19) ◽  
pp. 1835 ◽  
Author(s):  
A.E. Kelly ◽  
I.F. Lealman ◽  
L.J. Rivers ◽  
S.D. Perrin ◽  
M. Silver

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