scholarly journals A MEMS lens scanner based on serpentine electrothermal bimorph actuators for large axial tuning

2020 ◽  
Vol 28 (16) ◽  
pp. 23439 ◽  
Author(s):  
Liang Zhou ◽  
Xiaomin Yu ◽  
Philip X.-L. Feng ◽  
Jianhua Li ◽  
Huikai Xie
Keyword(s):  
Bimorph Actuators

Interdomain region in single-crystal lithium niobate bimorph actuators produced by light annealing

2015 ◽  
Vol 60 (5) ◽  
pp. 700-705 ◽  
Author(s):  
I. V. Kubasov ◽  
M. S. Timshina ◽  
D. A. Kiselev ◽  
M. D. Malinkovich ◽  
A. S. Bykov ◽  
...  
Keyword(s):  
Lithium Niobate ◽  
Single Crystal ◽  
Bimorph Actuators

LQG Control and Robustness Study for a Prestressed Membrane With Bimorph Actuators

2014 ◽  
Author(s):  
Ipar Ferhat ◽  
Cornel Sultan
Keyword(s):  
Finite Element Method ◽  
Finite Element ◽  
Weak Form ◽  
Linear Quadratic ◽  
Linear Quadratic Gaussian ◽  
Nominal System ◽  
Order Form ◽  
Lqg Control ◽  
Bimorph Actuators ◽  
Element Method

Linear Quadratic Gaussian (LQG) control is developed for a prestressed square membrane with bimorph actuators attached to it. The membrane is modeled using the finite element method and the membrane is assumed to be clamped on all edges. After obtaining the mass, damping, stiffness and input matrices in second order form using the weak form Finite Element Method (FEM), the problem is represented in first order form to develop the LQG controller. To study the robustness of the system, the control and observer gain matrices developed for the nominal system are applied to systems obtained from the nominal system by modifying material properties and prestress.

Model Development for PZT Bimorph Actuation Employed for Micro-Air Vehicles

2016 ◽  
Author(s):  
John Crews ◽  
Nikolas Bravo ◽  
Ralph Smith
Keyword(s):  
Model Development ◽  
Micro Air Vehicles ◽  
Energy Model ◽  
Comprehensive Model ◽  
Actuator Dynamics ◽  
Rate Dependent ◽  
Dependent Behavior ◽  
Bimorph Actuators ◽  
Homogenized Energy Model ◽  
Air Vehicles

In the paper, we discuss the development of a model for PZT bimorph actuators used to power micro-air vehicles including Robobee. Due to highly dynamic drive regimes required for the actuators, models must quantify the nonlinear, hysteretic, and rate-dependent behavior inherent to PZT in these regimes. We employ the homogenized energy model (HEM) framework to model the actuator dynamics and numerically we illustrate the capability of the model to characterize the inherent hysteresis. This provides a comprehensive model, which can be inverted and implemented for certain control regimes.

scholarly journals Development of a New Piezoelectric Actuator with Slits

2013 ◽  
Vol 2013 ◽  
pp. 1-9
Author(s):  
Yasutomo Uetsuji ◽  
Hiroyuki Kuramae ◽  
Kazuyoshi Tsuchiya ◽  
Hidetoshi Sakamoto
Keyword(s):  
Piezoelectric Actuator ◽  
Large Deflection ◽  
Superior Performance ◽  
Uniform Electric Field ◽  
Optimum Geometry ◽  
Out Of Plane ◽  
Fixed Condition ◽  
Plane Direction ◽  
Health Monitoring Systems ◽  
Bimorph Actuators

A piezoelectric actuator was developed for fluid pumps in health monitoring systems. We devised a piezoelectric actuator with some slits, which allows the stretching and contracting deformation in in-plane direction and creates large deflection in out-of-plane direction. The static behaviors under uniform electric field have been analyzed by finite element method. And then, the optimum geometry of slits was searched by response surface methodology for unimorph and bimorph actuators to output the largest deflection under various fixed conditions. The computational results indicated that a bimorph actuator with cross-shaped slit under outside-fixed condition has superior performance for fluid pumps. The proposed slit-inserted actuators have been manufactured as an experiment. As a result, it was verified that the developed actuator can amplify the deflection compared with conventional nonslit actuators.

Static and dynamic high voltage limitation of series and parallel bimorph actuators

Mechatronics ◽  
2009 ◽  
Vol 19 (4) ◽  
pp. 520-528 ◽  
Author(s):  
Tao Li ◽  
Y.H. Chen ◽  
J. Ma
Keyword(s):  
High Voltage ◽  
Bimorph Actuators

A “Yin”-“Yang” complementarity strategy for design and fabrication of dual-responsive bimorph actuators

Nano Energy ◽  
2020 ◽  
Vol 68 ◽  
pp. 104302 ◽  
Author(s):  
Yong-Lai Zhang ◽  
Jia-Nan Ma ◽  
Sen Liu ◽  
Dong-Dong Han ◽  
Yu-Qing Liu ◽  
...  
Keyword(s):  
Dual Responsive ◽  
Yin Yang ◽  
Bimorph Actuators

scholarly journals Optimization of MEMS Actuator Driven by Shape Memory Alloy Thin Film Phase Change

2020 ◽  
Author(s):  
Cory R. Knick
Keyword(s):  
Shape Memory Alloy ◽  
Phase Change ◽  
Shape Memory ◽  
Curvature Radius ◽  
Alloy Thin Film ◽  
Individual Layer ◽  
Cantilever Length ◽  
Stress Changes ◽  
Bimorph Actuators ◽  
High Work

At the microscale, shape memory alloy (SMA) microelectromechanical system (MEMS) bimorph actuators offer great potential based on their inherently high work density. An optimization problem relating to the deflection and curvature based on shape memory MEMS bimorph was identified, formulated, and solved. Thicknesses of the SU-8 photoresist and nickel-titanium alloy (NiTi) was identified that yielded maximum deflections and curvature radius based on a relationship among individual layer thicknesses, elastic modulus, and cantilever length. This model should serve as a guideline for optimal NiTi and SU-8 thicknesses to drive large deflections and curvature radius that are most suitable for microrobotic actuation, micromirrors, micropumps, and microgrippers. This model would also be extensible to other phase-change-driven actuators where nonlinear and significant residual stress changes are used to drive actuation.

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