Laser energy absorption prediction of silicon substrate surface from a mid- and high-spatial frequency error
2004 ◽
Vol 39
(14)
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pp. 4669-4670
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2017 ◽
Vol 124
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pp. 287-291
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1981 ◽
Vol 25
(6)
◽
pp. 537-545
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2007 ◽
Vol 127
◽
pp. 307-312
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