scholarly journals Reflective aperiodic multilayer filters for metrology at XUV sources

2020 ◽  
Vol 28 (3) ◽  
pp. 3331
Author(s):  
J. L. P. Barreaux ◽  
I. V. Kozhevnikov ◽  
H. M. J. Bastiaens ◽  
F. Bijkerk ◽  
K.-J. Boller
Keyword(s):  
Multilayer Filters

scholarly journals Optical monitoring of nonquarterwave layers of dielectric multilayer filters using optical admittance

2006 ◽  
Vol 14 (6) ◽  
pp. 2473 ◽  
Author(s):  
Byung Chun ◽  
Chang Kwon Hwangbo ◽  
Jong Sup Kim
Keyword(s):  
Optical Monitoring ◽  
Multilayer Filters ◽  
Dielectric Multilayer

Synthesis of reflective optical multilayer filters

2008 ◽  
Author(s):  
Valeriy H. Bagmanov ◽  
Ruslan V. Kutluyarov ◽  
Albert H. Sultanov
Keyword(s):  
Multilayer Filters

Ion Effects in Optical Films

1991 ◽  
Vol 223 ◽  
Author(s):  
U. J. Gibson
Keyword(s):  
Thin Films ◽  
Ion Beams ◽  
Index Of Refraction ◽  
Gradient Index ◽  
Index Structures ◽  
Film Properties ◽  
Optical Films ◽  
Multilayer Filters ◽  
Ion Effects ◽  
Deposition Processes

ABSTRACTIon bombardment during growth of thin films has been shown to be a powerful technique for alteration of a wide variety of film properties from index of refraction and stoichiometry to density and abrasion resistance. A brief review of the deposition processes and ion effects of relevance to the production of optical films is presented. Application of the technique to some particular problems in films with both optical and protective roles, and the use of ion beams to alter the chemical composition and hence index of films will be discussed. Both homogeneous and spatially non-uniform coatings will be discussed, including generation of multilayer filters and gradient index structures in waveguiding films.

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