Real-time monitoring and gradient feedback enable accurate trimming of ion-implanted silicon photonic devices
2011 ◽
Vol 32
(7)
◽
pp. 1957-1966
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2011 ◽
Vol 133
(38)
◽
pp. 14864-14867
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2001 ◽
Vol 11
(PR3)
◽
pp. Pr3-1175-Pr3-1182
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Keyword(s):