scholarly journals Characterization of digital dispersive spectrometers by low coherence interferometry

2017 ◽  
Vol 25 (4) ◽  
pp. 3222 ◽  
Author(s):  
Ó. Martínez-Matos ◽  
C. Rickenstorff ◽  
S. Zamora ◽  
J.G. Izquierdo ◽  
P. Vaveliuk
Keyword(s):  
Low Coherence ◽  
Low Coherence Interferometry

Optical characterization of dense tissues using low-coherence interferometry

1993 ◽  
Author(s):  
Joseph M. Schmitt ◽  
Alexander R. Knuettel ◽  
Amir H. Gandjbakhche ◽  
Robert F. Bonner
Keyword(s):  
Optical Characterization ◽  
Low Coherence ◽  
Low Coherence Interferometry

Characterization of a photonic crystal fiber mode converter using low coherence interferometry

2009 ◽  
Vol 34 (7) ◽  
pp. 1123 ◽  
Author(s):  
Purnananda Nandi ◽  
Zilun Chen ◽  
Agata Witkowska ◽  
William J. Wadsworth ◽  
Timothy A. Birks ◽  
...  
Keyword(s):  
Photonic Crystal ◽  
Photonic Crystal Fiber ◽  
Mode Converter ◽  
Low Coherence ◽  
Crystal Fiber ◽  
Low Coherence Interferometry ◽  
Fiber Mode

Novel Noncontact Thickness Metrology for Partially Transparent and Nontransparent Wafers for Backend Semiconductor Manufacturing

2004 ◽  
Vol 829 ◽  
Author(s):  
Wojciech J. Walecki ◽  
Vitali Souchkov ◽  
Kevin Lai ◽  
Phuc Van ◽  
Manuel Santos ◽  
...  
Keyword(s):  
Semiconductor Manufacturing ◽  
Rough Surfaces ◽  
Optical Interferometry ◽  
Smooth Surfaces ◽  
Low Coherence ◽  
Low Coherence Interferometry ◽  
Single Probe ◽  
Thin Semiconductor ◽  
Compound Materials

ABSTRACTSingle probe infrared low coherence optical interferometry has been proven to be an effective tool for characterization of thin and ultra-thin semiconductor Si and compound materials wafers. Its application was however limited to wafers transparent at probing wavelength, and having relatively smooth surfaces. Purpose of this paper is to present an extension of low coherence interferometry to characterization of non-transparent wafers, and wafers with rough surfaces.

Dimensional characterization of large opaque samples and microdeformations by low coherence interferometry

2020 ◽  
Vol 59 (01) ◽  
pp. 1
Author(s):  
Nélida A. Russo ◽  
Eneas N. Morel ◽  
Jorge R. Torga ◽  
Ricardo Duchowicz
Keyword(s):  
Low Coherence ◽  
Low Coherence Interferometry
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