scholarly journals Freeform microlens array homogenizer for excimer laser beam shaping

2016 ◽  
Vol 24 (22) ◽  
pp. 24846 ◽  
Author(s):  
Yuhua Jin ◽  
Ali Hassan ◽  
Yijian Jiang
Keyword(s):  
Laser Beam ◽  
Excimer Laser ◽  
Microlens Array ◽  
Beam Shaping ◽  
Laser Beam Shaping

Excimer laser beam shaping and material processing using diffractive optics

1998 ◽  
Author(s):  
Stewart W. Williams ◽  
Paul J. Marsden ◽  
Nick C. Roberts ◽  
Jagjit Sidhu ◽  
Mark A. Venables
Keyword(s):  
Material Processing ◽  
Laser Beam ◽  
Excimer Laser ◽  
Beam Shaping ◽  
Diffractive Optics ◽  
Laser Beam Shaping

Excimer laser beam shaping and material processing using diffractive optics

1997 ◽  
Author(s):  
Stewart W. Williams ◽  
Paul J. Marsden ◽  
Nick C. Roberts ◽  
Jagjit Sidhu ◽  
Mark A. Venables
Keyword(s):  
Material Processing ◽  
Laser Beam ◽  
Excimer Laser ◽  
Beam Shaping ◽  
Diffractive Optics ◽  
Laser Beam Shaping

scholarly journals Tailored laser beam shaping for efficient and accurate microstructuring

2018 ◽  
Vol 124 (2) ◽  
Author(s):  
T. Häfner ◽  
J. Strauß ◽  
C. Roider ◽  
J. Heberle ◽  
M. Schmidt
Keyword(s):  
Laser Beam ◽  
Beam Shaping ◽  
Laser Beam Shaping
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