Soft mold-based hot embossing process for precision imprinting of optical components on non-planar surfaces

Jianwei Chen; Chenglin Gu; Hui Lin; Shih-Chi Chen

doi:10.1364/oe.23.020977

A New Moiré Grating Fabrication Technique Using Hot Embossing Lithography

Applied Mechanics and Materials ◽

10.4028/www.scientific.net/amm.83.7 ◽

2011 ◽

Vol 83 ◽

pp. 7-12 ◽

Cited By ~ 3

Author(s):

Min Jin Tang ◽

Hui Min Xie ◽

Jian Guo Zhu ◽

Peng Wan Chen ◽

Qing Ming Zhang ◽

...

Keyword(s):

Nanoimprint Lithography ◽

Hot Embossing ◽

Fabrication Technology ◽

Large Area ◽

Silicon Mold ◽

Optical Components ◽

Grating Fabrication ◽

Multi Scale ◽

Atomic Force ◽

Equal Spacing

Moiré grating is a basic optical component, and can be used in various moiré methods. The conventional grating fabrication technology is based on photolithography and holographic interferometry, however, it requires complex optical components and is very difficult to put into practice. In this study, nanoimprint lithography (NIL), or rather, hot embossing lithography (HEL), is proposed for producing high frequency grating. Compared with silicon mold, holographic moiré grating mold costs less and is not easy to break, thus is chosen to be the mold in HEL. Using this mold and the hot embossing system, the grating structure can be transferred to the polymer after HEL process. Through a number of experiments, the process parameters were optimized and gratings were successfully fabricated. The multi-scale morphology of the fabricated gratings was then characterized by scanning electron microscope (SEM), atomic force microscope (AFM) and moiré interferometry. The microscale images observed by AFM and SEM show the regulate dots with equal spacing and the macroscale moiré patterns illuminate the excellent qualities of fabricated grating in a large area. The successful experimental results demonstrate the feasibility of the grating fabricated by HEL for the moiré measurement.

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Replication of optical components by hot embossing

10.1117/12.859077 ◽

2010 ◽

Cited By ~ 4

Author(s):

M. Worgull ◽

M. Schneider ◽

M. Heilig ◽

A. Kolew ◽

H. Dinglreiter ◽

...

Keyword(s):

Hot Embossing ◽

Optical Components

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Precision Mould Making – From Macro to Micro

Key Engineering Materials ◽

10.4028/www.scientific.net/kem.447-448.1 ◽

2010 ◽

Vol 447-448 ◽

pp. 1-8 ◽

Cited By ~ 2

Author(s):

Ekkard Brinksmeier ◽

Jen Osmer

Keyword(s):

High Surface ◽

Hot Embossing ◽

Diamond Turning ◽

Advanced Materials ◽

Precision Grinding ◽

Machining Processes ◽

Optical Components ◽

Diamond Machining ◽

Optical Glasses ◽

Optical Applications

Nowadays several qualified technologies have been established for the manufacturing of precision moulds. The fields of application can mainly be divided into moulds for non-optical and optical components. For optical moulding inserts the development goes from basic rotational symmetric geometries to complex surfaces like steep aspheres and freeforms which can additionally be overlaid with microstructures. The moulded components require a figure accuracy in the (sub-) micrometer and surface roughness in the nanometer range while moulds for replication also need advanced materials with high surface integrity. Here, diamond machining processes, e.g. diamond turning and milling as well as precision grinding and polishing are necessary for the manufacturing of precision moulding inserts from various materials. Depending on the material and application of the applied part to be replicated different replication techniques are used like injection moulding of plastics, hot embossing and precision moulding of optical glasses. For non-optical applications the current technical progress is driven by miniaturized products which are typically produced in mass production by replication techniques like hot embossing or metal forming. Each of these processes requires specific properties of the mould. Therefore, the surface topography and tribological conditions are of particular importance.

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Hot embossing and injection molding for micro-optical components

10.1117/12.284110 ◽

1997 ◽

Cited By ~ 8

Author(s):

Mathias Heckele ◽

Walter Bacher ◽

Thomas Hanemann ◽

Heinrich Ulrich

Keyword(s):

Injection Molding ◽

Hot Embossing ◽

Optical Components

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Preparation of Thin Cadmium Telluride Samples for Electron Microscope Studies

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100052754 ◽

1974 ◽

Vol 32 ◽

pp. 548-549

Author(s):

T. J. Magee ◽

J. Peng ◽

J. Bean

Keyword(s):

Electron Microscope ◽

Sulfuric Acid ◽

Solid State ◽

Sample Preparation ◽

Cadmium Telluride ◽

Potassium Dichromate ◽

Optical Components ◽

The Past ◽

Solid State Devices

Cadmium telluride has become increasingly important in a number of technological applications, particularly in the area of laser-optical components and solid state devices, Microstructural characterizations of the material have in the past been somewhat limited because of the lack of suitable sample preparation and thinning techniques. Utilizing a modified jet thinning apparatus and a potassium dichromate-sulfuric acid thinning solution, a procedure has now been developed for obtaining thin contamination-free samples for TEM examination.

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Characterization of machined polystyrene foam

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s042482010015383x ◽

1989 ◽

Vol 47 ◽

pp. 372-373

Author(s):

C. W. Price ◽

E. F. Lindsey ◽

R. M. Franks ◽

M. A. Lane

Keyword(s):

Surface Finish ◽

Cell Walls ◽

Surface Structures ◽

Efficient Technique ◽

Low Density ◽

Polystyrene Foam ◽

Planar Surfaces ◽

Machining Characteristics

Diamond-point turning is an efficient technique for machining low-density polystyrene foam, and the surface finish can be substantially improved by grinding. However, both diamond-point turning and grinding tend to tear and fracture cell walls and leave asperities formed by agglomerations of fragmented cell walls. Vibratoming is proving to be an excellent technique to form planar surfaces in polystyrene, and the machining characteristics of vibratoming and diamond-point turning are compared.Our work has demonstrated that proper evaluation of surface structures in low density polystyrene foam requires stereoscopic examinations; tilts of + and − 3 1/2 degrees were used for the stereo pairs. Coating does not seriously distort low-density polystyrene foam. Therefore, the specimens were gold-palladium coated and examined in a Hitachi S-800 FESEM at 5 kV.

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Self-Assembly Optical Components

MRS Proceedings ◽

10.1557/proc-771-10.10 ◽

2003 ◽

Vol 771 ◽

Cited By ~ 2

Author(s):

Pavel I. Lazarev ◽

Michael V. Paukshto ◽

Elena N. Sidorenko

Keyword(s):

Optical Properties ◽

Self Assembly ◽

Crystalline State ◽

Liquid Crystalline ◽

Film Deposition ◽

X Ray Diffraction ◽

Optical Components ◽

Crystal Film ◽

Solid Film ◽

Thin Crystal

AbstractWe report a new method of Thin Crystal Film deposition. In the present paper we describe the method of crystallization, structure, and optical properties of Bisbenzimidazo[2,1-a:1',2',b']anthra[2,1,9-def:6,5,10-d'e'f']-diisoquinoline-6,9-dion (mixture with cis-isomer) (abbreviated DBI PTCA) sulfonation product. The Thin Crystal Film has a thickness of 200-1000 nm, with anisotropic optical properties such as refraction and absorption indices. X-ray diffraction data evidences a lyotropic liquid crystalline state in liquid phase and crystalline state in solid film. Anisotropic optical properties of the film make it useful in optical devices, e.g. liquid crystal displays.

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