Residual vibration reduction of white-light scanning interferometry by input shaping
2004 ◽
Vol 127
(4)
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pp. 307-314
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1994 ◽
Vol 116
(2)
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pp. 654-659
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Keyword(s):
2013 ◽
Vol 30
(7)
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pp. 717-724
2016 ◽
Vol 8
(4)
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pp. 168781401664650
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Keyword(s):
Keyword(s):
2011 ◽
Vol 121-126
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pp. 2676-2680
2016 ◽
Vol 32
(1)
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pp. 75-90
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