scholarly journals Focused ion beam post-processing of optical fiber Fabry-Perot cavities for sensing applications

2014 ◽  
Vol 22 (11) ◽  
pp. 13102 ◽  
Author(s):  
Ricardo M. André ◽  
Simon Pevec ◽  
Martin Becker ◽  
Jan Dellith ◽  
Manfred Rothhardt ◽  
...  
2014 ◽  
Author(s):  
Ricardo M. Andre ◽  
Simon Pevec ◽  
Martin Becker ◽  
Jan Dellith ◽  
Manfred Rothhardt ◽  
...  

2011 ◽  
Vol 82 (7) ◽  
pp. 076103 ◽  
Author(s):  
Wu Yuan ◽  
Fei Wang ◽  
Alexey Savenko ◽  
Dirch Hjorth Petersen ◽  
Ole Bang

2016 ◽  
Author(s):  
Ricardo M. André ◽  
Stephen C. Warren-Smith ◽  
Martin Becker ◽  
Jan Dellith ◽  
Manfred Rothhardt ◽  
...  

2016 ◽  
Vol 24 (13) ◽  
pp. 14053 ◽  
Author(s):  
Ricardo M. André ◽  
Stephen C. Warren-Smith ◽  
Martin Becker ◽  
Jan Dellith ◽  
Manfred Rothhardt ◽  
...  

2013 ◽  
Vol 1530 ◽  
Author(s):  
A. Bendavid ◽  
L. Wieczorek ◽  
R. Chai ◽  
J. S. Cooper ◽  
B. Raguse

ABSTRACTA large area nanogap electrode fabrication method combinig conventional lithography patterning with the of focused ion beam (FIB) is presented. Lithography and a lift-off process were used to pattern 50 nm thick platinum pads having an area of 300 μm × 300 μm. A range of 30-300 nm wide nanogaps (length from 300 μm to 10 mm ) were then etched using an FIB of Ga+ at an acceleration voltage of 30 kV at various beam currents. An investigation of Ga+ beam current ranging between 1-50 pA was undertaken to optimise the process for the current fabrication method. In this study, we used Monte Carlo simulation to calculate the damage depth in various materials by the Ga+. Calculation of the recoil cascades of the substrate atoms are also presented. The nanogap electrodes fabricated in this study were found to have empty gap resistances exceeding several hundred MΩ. A comparison of the gap length versus electrical resistance on glass substrates is presented. The results thus outline some important issues in low-conductance measurements. The proposed nanogap fabrication method can be extended to various sensor applications, such as chemical sensing, that employ the nanogap platform. This method may be used as a prototype technique for large-scale fabrication due to its simple, fast and reliable features.


2019 ◽  
Vol 11 (4) ◽  
pp. 121
Author(s):  
Andrzej Kaźmierczak ◽  
Mateusz Słowikowski ◽  
Krystian Pavłov ◽  
Maciej Filipiak ◽  
Ryszard Piramidowicz

We present a low-cost scheme for non-permanent optical signal coupling for prospective application in single use photonic integrated chips. The proposed scheme exploits the use of polymer kinoform microlenses. The feasibility of the proposed solution is demonstrated by the experimental investigation of the optical signal coupling from single mode optical fiber (SMF) to the test structure of SixNy integrated waveguide. Full Text: PDF ReferencesM. Smit et al., "An introduction to InP-based generic integration technology," Semiconductor Science and Technology, 29 (8), 083001, 2014 CrossRef R. Baets et al., "Silicon Photonics: silicon nitride versus silicon-on-insulator," in Optical Fiber Communication Conference, OSA Technical Digest (online) (Optical Society of America, 2016), paper Th3J.1. CrossRef K. Shiraishi et al., "A silicon-based spot-size converter between single-mode fibers and Si-wire waveguides using cascaded tapers," Appl. Phys. Lett. 91, 141120 (2007) CrossRef Y. Sobu et al., "GaInAsP/InP waveguide dual core spot size converter for optical fiber,"IEEE Photonic Society 24th Annual Meeting, 469-470, (2011). CrossRef F. Van Laere et al., "Compact and Highly Efficient Grating Couplers Between Optical Fiber and Nanophotonic Waveguides," Journal of Lightwave Technology, vol. 25, no. 1, pp. 151-156, Jan. 2007. CrossRef A. Kaźmierczak et al., "Light coupling and distribution or Si3N4/SiO2 integrated multichannel single mode sensing system," Opt. Eng. 48, 2009, pp. 014401 CrossRef M. Rossi et al., "Arrays of anamorphic phase-matched Fresnel elements for diode-to-fiber coupling," Appl. Opt. 34, 2483-2488 (1995) CrossRef M. Prasciolu et al, "Fabrication of Diffractive Optical Elements On-Fiber for Photonic Applications by Nanolitography," Japanese Journal of Applied Physics, Volume 42, (2003) CrossRef F.Schiappelli et al., "Efficient fiber-to-waveguide coupling by a lens on the end of the optical fiber fabricated by focused ion beam milling" Microelectronic Engineering Volumes 73-74, pp.397-404 (2004) CrossRef


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