scholarly journals Uncertainty improvement of geometrical thickness and refractive index measurement of a silicon wafer using a femtosecond pulse laser

2012 ◽  
Vol 20 (11) ◽  
pp. 12184 ◽  
Author(s):  
Saerom Maeng ◽  
Jungjae Park ◽  
Byungsung O ◽  
Jonghan Jin
Keyword(s):  
Refractive Index ◽  
Silicon Wafer ◽  
Pulse Laser ◽  
Femtosecond Pulse ◽  
Refractive Index Measurement ◽  
Femtosecond Pulse Laser ◽  
Index Measurement

Submicron micromachining on silicon wafer using femtosecond pulse laser

2001 ◽  
Vol 13 (1) ◽  
pp. 41-43 ◽  
Author(s):  
Bryan K. A. Ngoi ◽  
K. Venkatakrishnan ◽  
L. E. N. Lim ◽  
B. Tan
Keyword(s):  
Silicon Wafer ◽  
Pulse Laser ◽  
Femtosecond Pulse ◽  
Femtosecond Pulse Laser

scholarly journals Thickness and refractive index measurement of a silicon wafer based on an optical comb

2010 ◽  
Vol 18 (17) ◽  
pp. 18339 ◽  
Author(s):  
Jonghan Jin ◽  
Jae Wan Kim ◽  
Chu-Shik Kang ◽  
Jong-Ahn Kim ◽  
Tae Bong Eom
Keyword(s):  
Refractive Index ◽  
Silicon Wafer ◽  
Refractive Index Measurement ◽  
Index Measurement

scholarly journals Development of a Temperature-Controlled Optical Planar Waveguide Sensor with Lossy Mode Resonance for Refractive Index Measurement

Photonics ◽  
2021 ◽  
Vol 8 (6) ◽  
pp. 199
Author(s):  
Yu-Cheng Lin ◽  
Liang-Yü Chen
Keyword(s):  
Refractive Index ◽  
Optical Fiber ◽  
Temperature Control ◽  
Planar Waveguide ◽  
Metallic Oxide ◽  
Refractive Index Measurement ◽  
Index Measurement ◽  
Temperature Controlled ◽  
Optical Planar Waveguide ◽  
Active Temperature

The generation of lossy mode resonances (LMR) with a metallic oxide film deposited on an optical fiber has attracted the attention of many applications. However, an LMR-based optical fiber sensor is frangible, and therefore it does not allow control of the temperature and is not suited to mass production. This paper aims to develop a temperature-controlled lossy mode resonance (TC-LMR) sensor on an optical planar waveguide with an active temperature control function in which an ITO film is not only used as the LMR resonance but also to provide the heating function to achieve the benefits of compact size and active temperature control. A simple flat model about the heat transfer mechanism is proposed to determine the heating time constant for the applied voltages. The TC-LMR sensor is evaluated experimentally for refractive index measurement using a glycerol solution. The heating temperature functions relative to the controlled voltages for water and glycerol are obtained to verify the performance of the TC-LMR sensor. The TC-LMR sensor is a valuable sensing device that can be used in clinical testing and point of care for programming heating with precise temperature control.

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