scholarly journals Extreme ultraviolet laser-based table-top aerial image metrology of lithographic masks

2010 ◽  
Vol 18 (14) ◽  
pp. 14467 ◽  
Author(s):  
Fernando Brizuela ◽  
Sergio Carbajo ◽  
Anne Sakdinawat ◽  
David Alessi ◽  
Dale H. Martz ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Aerial Image ◽  
Ultraviolet Laser ◽  
Image Metrology ◽  
Lithographic Masks

scholarly journals Table-top Extreme Ultraviolet Laser Aerial Imaging of Lithographic Masks

2010 ◽  
Author(s):  
Fernando Brizuela ◽  
Sergio Carbajo ◽  
Anne Sakdinawat ◽  
Yong Wang ◽  
David Alessi ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Ultraviolet Laser ◽  
Aerial Imaging ◽  
Lithographic Masks

scholarly journals Nanoimaging with a compact extreme-ultraviolet laser

2005 ◽  
Vol 30 (16) ◽  
pp. 2095 ◽  
Author(s):  
G. Vaschenko ◽  
F. Brizuela ◽  
C. Brewer ◽  
M. Grisham ◽  
H. Mancini ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Ultraviolet Laser

Fabrication of metallic micropatterns using table top extreme ultraviolet laser interferometric lithography

2008 ◽  
Vol 17 (2) ◽  
pp. 024019 ◽  
Author(s):  
L Ottaviano ◽  
F Bussolotti ◽  
S Piperno ◽  
M Rinaldi ◽  
S Santucci ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Ultraviolet Laser ◽  
Interferometric Lithography ◽  
Laser Interferometric

scholarly journals Extreme-ultraviolet laser metrology of O i transitions

2008 ◽  
Vol 389 (1) ◽  
pp. L4-L7 ◽  
Author(s):  
T. I. Ivanov ◽  
E. J. Salumbides ◽  
M. O. Vieitez ◽  
P. C. Cacciani ◽  
C. A. de Lange ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Ultraviolet Laser ◽  
Laser Metrology

Aerial image characterization for the defects in the extreme ultraviolet mask

2004 ◽  
Author(s):  
Myoung-Sul Yoo ◽  
Seung-Wook Park ◽  
Jong-Hoi Kim ◽  
Yeong-Keun Kwon ◽  
Hye-Keun Oh
Keyword(s):  
Extreme Ultraviolet ◽  
Aerial Image

Alignment system for solid-surface extreme-ultraviolet laser targets

1991 ◽  
Vol 30 (30) ◽  
pp. 4337
Author(s):  
Daniel Tauber ◽  
Santanu Basu ◽  
Peter L. Hagelstein
Keyword(s):  
Solid Surface ◽  
Extreme Ultraviolet ◽  
Ultraviolet Laser ◽  
Alignment System
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