Modeling, simulation, and open-loop control of a continuous facesheet MEMS deformable mirror
2006 ◽
Vol 23
(5)
◽
pp. 1074
◽
Keyword(s):
Keyword(s):
2007 ◽
Vol 24
(12)
◽
pp. 3827
◽
Keyword(s):
Keyword(s):
2011 ◽
Vol 418-420
◽
pp. 1865-1868