Table top schemes for nano-patterning with extreme ultraviolet lasers

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J. J. Rocca ◽  
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1996 ◽  
Vol 13 (2) ◽  
pp. 436 ◽  
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P. R. Herman ◽  
M. P. Le Flohic ◽  
B. Xiao ◽  
L. Zhao ◽  
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2004 ◽  
Vol 10 (6) ◽  
pp. 1373-1381 ◽  
Author(s):  
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Y. Abou-Ali ◽  
A. Demir ◽  
Q. Dong ◽  
M.H. Edwards ◽  
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