Table top schemes for nano-patterning with extreme ultraviolet lasers
1996 ◽
Vol 13
(2)
◽
pp. 436
◽
1989 ◽
Vol 1
(1)
◽
pp. 214-220
◽
2004 ◽
Vol 10
(6)
◽
pp. 1373-1381
◽
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