A Far-Field Implementation of Near-Field Phase-Shift Lithography Using Diffractive Optical Elements
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2013 ◽
Vol 61
(4)
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pp. 1763-1776
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2005 ◽
Vol 7
(6)
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pp. S276-S279
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2018 ◽
Vol 146
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pp. 2403-2415
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