A Low-Cost All-Silica Fabry-Perot Pressure Sensor for Biomedical Applications

2014 ◽  
Author(s):  
Yuting Li ◽  
Wentao Zhang ◽  
Zhaogang Wang ◽  
Hongbin Xu ◽  
Fang Li
Keyword(s):  
Pressure Sensor ◽  
Biomedical Applications ◽  
Low Cost ◽  
Fabry Perot

scholarly journals An Optimized PDMS Thin Film Immersed Fabry-Perot Fiber Optic Pressure Sensor for Sensitivity Enhancement

Coatings ◽  
2019 ◽  
Vol 9 (5) ◽  
pp. 290 ◽  
Author(s):  
Cheng Luo ◽  
Xiangnan Liu ◽  
Jinrong Liu ◽  
Jian Shen ◽  
Hui Li ◽  
...  
Keyword(s):  
Film Thickness ◽  
Pressure Sensor ◽  
Fiber Optic ◽  
Diffusion Rate ◽  
Low Cost ◽  
Viscosity Coefficient ◽  
External Pressure ◽  
Joint Surface ◽  
Pdms Film ◽  
Fabry Perot

To effectively control the critical thickness of a polydimethylsiloxane (PDMS) film and enhance the sensitivity characteristics of the fiber pressure sensor, we propose a new method to optimize the thickness of the PDMS film in a fiber tube. It is characterized by analyzing the relationship between the diffusion rate of the PDMS and its viscosity, and using an oven to solidify the PDMS to a certain extent to accurately control the diffusion rate and diffusion length of the PDMS in the fiber tube. We also used multiple transfer methods to control the volume of the PDMS in the fiber tube to minimize the thickness of the formed PDMS film. Fabry-Perot interference occurs when the surface of the PDMS film layer filled into the fiber tube and the adjacent single mode fiber/fiber tube form a joint surface. This method forms a new fiber-optic Fabry-Perot pressure sensor that is very sensitive to external pressure parameters. The experimental results show that the optimized film thickness will be reduced to an order of 20 μm. Correspondingly, the fiber-optic pressure sensor has a sensitivity of up to 100 pm/kPa, which is about 100 times that reported in the literature. The structure also has better resistance to temperature interference. To our knowledge, this is the first in-depth study of the effects of the PDMS viscosity coefficient, diffusion rate, and fiber pressure sensitivity in fiber. The film thickness optimization method has some advantages, including a low cost, good controllability, and good application value in high sensitivity pressure and sound wave detection.

Design, Fabrication and Characterization of Ultra Miniature Piezoresistive Pressure Sensors for Medical Implants

2011 ◽  
Vol 254 ◽  
pp. 94-98 ◽  
Author(s):  
Li Shiah Lim ◽  
Woo Tae Park ◽  
Liang Lou ◽  
Han Hua Feng ◽  
Pushpapraj Singh
Keyword(s):  
Pressure Sensor ◽  
Biomedical Applications ◽  
Low Cost ◽  
Silicon Nanowire ◽  
Pressure Sensors ◽  
High Sensitivity ◽  
Medical Implants ◽  
Mems Technology ◽  
Piezoresistive Pressure Sensors

Pressure sensors using MEMS technology have been advanced due to their low cost, small size and high sensitivity, which is an advantage for biomedical applications. In this paper,silicon nanowire was proposed to be used as the piezoresistors due to the high sensitivity [1][2].The sensors were designed, and characterized for the use of medical devices for pressure monitoring. The pressure sensor size is 2mm x 2mm with embedded SiNWs of 90nm x150nm been fabricated. Additionally, the sensitivity of 0.0024 Pa-1 pressure sensor has been demonstrated.

Low-cost and miniature all-silica Fabry–Perot pressure sensor for intracranial pressure measurement

2014 ◽  
Vol 12 (11) ◽  
pp. 111401-111404 ◽  
Author(s):  
Yuting Li Yuting Li ◽  
Wentao Zhang Wentao Zhang ◽  
Zhaogang Wang Zhaogang Wang ◽  
Hongbin Xu Hongbin Xu ◽  
Jing Han Jing Han ◽  
...  
Keyword(s):  
Intracranial Pressure ◽  
Pressure Sensor ◽  
Pressure Measurement ◽  
Low Cost ◽  
Fabry Perot

CMOS-MEMS Based Current Mirror MOSFET Embedded Pressure Sensor for Healthcare and Biomedical Applications

2013 ◽  
Vol 647 ◽  
pp. 315-320 ◽  
Author(s):  
Pradeep Kumar Rathore ◽  
Brishbhan Singh Panwar
Keyword(s):  
Pressure Sensor ◽  
Biomedical Applications ◽  
Circuit Simulation ◽  
Applied Pressure ◽  
Pressure Sensors ◽  
Cmos Technology ◽  
Current Mirror ◽  
Sensing Element ◽  
Pressure Sensing ◽  
Cmos Mems

This paper reports on the design and optimization of current mirror MOSFET embedded pressure sensor. A current mirror circuit with an output current of 1 mA integrated with a pressure sensing n-channel MOSFET has been designed using standard 5 µm CMOS technology. The channel region of the pressure sensing MOSFET forms the flexible diaphragm as well as the strain sensing element. The piezoresistive effect in MOSFET has been exploited for the calculation of strain induced carrier mobility variation. The output transistor of the current mirror forms the active pressure sensing MOSFET which produces a change in its drain current as a result of altered channel mobility under externally applied pressure. COMSOL Multiphysics is utilized for the simulation of pressure sensing structure and Tspice is employed to evaluate the characteristics of the current mirror pressure sensing circuit. Simulation results show that the pressure sensor has a sensitivity of 10.01 mV/MPa. The sensing structure has been optimized through simulation for enhancing the sensor sensitivity to 276.65 mV/MPa. These CMOS-MEMS based pressure sensors integrated with signal processing circuitry on the same chip can be used for healthcare and biomedical applications.

scholarly journals A 300-GHz low-cost high-gain fully metallic Fabry–Perot cavity antenna for 6G terahertz wireless communications

2021 ◽  
Vol 11 (1) ◽  
Author(s):  
Basem Aqlan ◽  
Mohamed Himdi ◽  
Hamsakutty Vettikalladi ◽  
Laurent Le-Coq
Keyword(s):  
Communication Systems ◽  
Low Cost ◽  
Frequency Selective Surface ◽  
High Gain ◽  
Wireless Communication Systems ◽  
Beam Radiation ◽  
Compact Size ◽  
Fabry Perot ◽  
Operating Bandwidth ◽  
Polarization Level

AbstractA low-cost, compact, and high gain Fabry–Perot cavity (FPC) antenna which operates at 300 GHz is presented. The antenna is fabricated using laser-cutting brass technology. The proposed antenna consists of seven metallic layers; a ground layer, an integrated stepped horn element (three-layers), a coupling layer, a cavity layer, and an aperture-frequency selective surface (FSS) layer. The proposed aperture-FSS function acts as a partially reflective surface, contributing to a directive beam radiation. For verification, the proposed sub-terahertz (THz) FPC antenna prototype was developed, fabricated, and measured. The proposed antenna has a measured reflection coefficient below − 10 dB from 282 to 304 GHz with a bandwidth of 22 GHz. The maximum measured gain observed is 17.7 dBi at 289 GHz, and the gain is higher than 14.4 dBi from 285 to 310 GHz. The measured radiation pattern shows a highly directive pattern with a cross-polarization level below − 25 dB over the whole band in all cut planes, which confirms with the simulation results. The proposed antenna has a compact size, low fabrication cost, high gain, and wide operating bandwidth. The total height of the antenna is 1.24 $${\lambda }_{0}$$ λ 0 ($${\lambda }_{0}$$ λ 0 at the design frequency, 300 GHz) , with a size of 2.6 mm × 2.6 mm. The proposed sub-THz waveguide-fed FPC antenna is suitable for 6G wireless communication systems.

Novel pressure sensor with a Fabry-Perot interferometer

2000 ◽  
Author(s):  
Zhiquan Li ◽  
Lina Fan ◽  
Xifu Qiang
Keyword(s):  
Pressure Sensor ◽  
Fabry Perot
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