Gradient index optical systems for endoscope applications and beam shaping of laser diodes

Author(s):  
Bernhard Messerschmidt ◽  
Torsten Possner ◽  
Peter Schreiber
1984 ◽  
Vol 23 (11) ◽  
pp. 1725 ◽  
Author(s):  
G. von Bally ◽  
W. Schmidthaus ◽  
H. Sakowski ◽  
W. Mette

1993 ◽  
Author(s):  
Grigoriy I. Greisukh ◽  
Sergei A. Stepanov

1997 ◽  
Vol 70 (8) ◽  
pp. 919-921 ◽  
Author(s):  
Jen-Tsorng Chang ◽  
Der-Chin Su ◽  
Zhi-Xian Huang ◽  
Yang-Tung Huang
Keyword(s):  

Author(s):  
Yosuke Koga ◽  
Yuki Misaki ◽  
Taiki Nakano ◽  
Toshinori Hora ◽  
Shiyuan Yang
Keyword(s):  

2019 ◽  
Vol 48 (8) ◽  
pp. 805010
Author(s):  
辛光泽 Xin Guangze ◽  
陈东启 Chen Dongqi ◽  
蔡 毅 Cai Yi ◽  
白廷柱 Bai Tingzhu ◽  
王岭雪 Wang Lingxue

2019 ◽  
Vol 215 ◽  
pp. 01001
Author(s):  
Raoul Kirner ◽  
Wilfried Noell ◽  
Toralf Scharf ◽  
Reinhard Voelkel

The application of laser light sources for illumination tasks like in mask aligner lithography relies on non-imaging optical systems with multi-aperture elements for beam shaping. When simulating such systems, the traditional approach is to separate the beam-shaping part (incoherent simulation) from dealing with coherence properties of the illuminating laser light source (diffraction theory with statistical treatment). We present an approach using Gaussian beam decomposition to include coherence simulation into ray tracing, combining these two parts, to get a complete picture in one simulation. We discuss source definition for such simulations, and verify our assumptions on a well-known system. We then apply our approach to an imaging beam shaping setup with microoptical multi-aperture elements. We compare the simulation to measurements of a similar beam-shaping setup with a 193 nm continuous-wave laser in a mask-aligner configuration.


2007 ◽  
Author(s):  
Desheng Xin ◽  
Jianjia Zhang ◽  
Ling Wang ◽  
Mengmeng Zhang ◽  
Xiguang Ma

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