Imaging for Wafer Inspection using Vertical Cavity Surface Emitting Laser based Swept Source Optical Coherence Tomography

2016 ◽  
Author(s):  
Yu-Gyeong Chae ◽  
Byungjun Park ◽  
Minah Kim ◽  
Youngjae Won ◽  
Seungrag Lee
Keyword(s):  
Optical Coherence Tomography ◽  
Cavity Surface ◽  
Optical Coherence ◽  
Swept Source ◽  
Wafer Inspection ◽  
Vertical Cavity Surface ◽  
Surface Emitting Laser ◽  
Vertical Cavity

scholarly journals High-precision, high-accuracy ultralong-range swept-source optical coherence tomography using vertical cavity surface emitting laser light source

2013 ◽  
Vol 38 (5) ◽  
pp. 673 ◽  
Author(s):  
Ireneusz Grulkowski ◽  
Jonathan J. Liu ◽  
Benjamin Potsaid ◽  
Vijaysekhar Jayaraman ◽  
James Jiang ◽  
...  
Keyword(s):  
Optical Coherence Tomography ◽  
Light Source ◽  
Laser Light ◽  
High Accuracy ◽  
Cavity Surface ◽  
Swept Source ◽  
Vertical Cavity Surface ◽  
Surface Emitting Laser ◽  
Vertical Cavity ◽  
Laser Light Source

High-speed vertical-cavity surface-emitting laser (VCSEL) absorption spectroscopy of ammonia (NH3) near 1.54 μm

2003 ◽  
Vol 76 (5) ◽  
pp. 603-608 ◽  
Author(s):  
G. Totschnig ◽  
M. Lackner ◽  
R. Shau ◽  
M. Ortsiefer ◽  
J. Rosskopf ◽  
...  
Keyword(s):  
Absorption Spectroscopy ◽  
High Speed ◽  
Cavity Surface ◽  
Vertical Cavity Surface ◽  
Surface Emitting Laser ◽  
Vertical Cavity
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